Academic Journal
Experiments on MEMS Integration in 0.25 μm CMOS Process
| العنوان: | Experiments on MEMS Integration in 0.25 μm CMOS Process |
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| المؤلفون: | Michalik, Piotr, Fernández, Daniel, Wietstruck, Matthias, Kaynak, Mehmet, Madrenas, Jordi |
| بيانات النشر: | MDPI |
| سنة النشر: | 2018 |
| المجموعة: | LeibnizOpen (The Leibniz Association) |
| مصطلحات موضوعية: | Accelerometer, BEOL (Back End of Line), CMOS, CMOS-MEMS, MEMS |
| Time: | 620 |
| الوصف: | In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology. The experimental prototyping process is illustrated with examples of three CMOS-MEMS chips and starts from rough process exploration and characterization, followed by the definition of the useful MEMS design space to finally reach CMOS-MEMS devices with inertial mass up to 4.3 μg and resonance frequency down to 4.35 kHz. Furthermore, the presented design techniques help to avoid several structural and reliability issues such as layer delamination, device stiction, passivation fracture or device cracking due to stress. ; publishedVersion |
| نوع الوثيقة: | article in journal/newspaper |
| وصف الملف: | application/pdf |
| اللغة: | English |
| DOI: | 10.34657/10058 |
| الاتاحة: | https://oa.tib.eu/renate/handle/123456789/11032 https://doi.org/10.34657/10058 |
| Rights: | CC BY 4.0 Unported ; https://creativecommons.org/licenses/by/4.0 |
| رقم الانضمام: | edsbas.86F28FF1 |
| قاعدة البيانات: | BASE |
| DOI: | 10.34657/10058 |
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