Academic Journal
A Novel Fabrication Technique for MEMS Based on Agglomeration of Powder by ALD
| العنوان: | A Novel Fabrication Technique for MEMS Based on Agglomeration of Powder by ALD |
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| المؤلفون: | Lisec, T., Reimer, T., Knez, M., Chemnitz, S., Schulz-Walsemann, A.V., Kulkarni, A. |
| سنة النشر: | 2017 |
| المجموعة: | Publikationsdatenbank der Fraunhofer-Gesellschaft |
| Time: | 621 |
| الوصف: | S.1093-1098 ; This paper describes a novel fabrication technique for microelectromechanical systems (MEMS) based on the agglomeration of micron-sized powder into rigid 3-D porous structures by means of atomic layer deposition (ALD). Since ALD is performed at low temperatures, such structures can be created from a broad variety of materials. It is shown that the compatibility of substrates with embedded porous structures to common back-end-of-line environment can be regained, and post-processed by applying standard processes of MEMS and integrated circuit technology is possible. In such a way, for the first time, nearly any material can be integrated onto silicon substrates in a simple and generic way. Moreover, not only a particular porosity or internal surface can be targeted. The bulk properties of the structure can be tailored as well, which opens up unique prospects for the future of MEMS. ; 26 ; Nr.5 |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| Relation: | Journal of Microelectromechanical Systems; https://publica.fraunhofer.de/handle/publica/252063 |
| DOI: | 10.1109/JMEMS.2017.2708814 |
| الاتاحة: | https://publica.fraunhofer.de/handle/publica/252063 https://doi.org/10.1109/JMEMS.2017.2708814 |
| رقم الانضمام: | edsbas.86CE40B8 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1109/JMEMS.2017.2708814 |
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