Academic Journal
Pattern transfer of nano-scale ferroelectric PZT gratings by a reversal nanoimprint lithography
| العنوان: | Pattern transfer of nano-scale ferroelectric PZT gratings by a reversal nanoimprint lithography |
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| المؤلفون: | Li, Zhi-Dong, Shen, Zhen-Kui, Hui, Wen-Yuan, Qiu, Zhi-Jun, Qu, Xin-Ping, Chen, Yi-Fang, Liu, Ran |
| المساهمون: | National Basic Research Program of China |
| المصدر: | Microelectronic Engineering ; volume 88, issue 8, page 2037-2040 ; ISSN 0167-9317 |
| بيانات النشر: | Elsevier BV |
| سنة النشر: | 2011 |
| المجموعة: | ScienceDirect (Elsevier - Open Access Articles via Crossref) |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1016/j.mee.2011.01.055 |
| الاتاحة: | http://dx.doi.org/10.1016/j.mee.2011.01.055 https://api.elsevier.com/content/article/PII:S0167931711000803?httpAccept=text/xml https://api.elsevier.com/content/article/PII:S0167931711000803?httpAccept=text/plain |
| Rights: | https://www.elsevier.com/tdm/userlicense/1.0/ |
| رقم الانضمام: | edsbas.79DBC330 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1016/j.mee.2011.01.055 |
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