Academic Journal
AlN/Pt/LN-Y128 packageless acoustic wave temperature sensor
| العنوان: | AlN/Pt/LN-Y128 packageless acoustic wave temperature sensor |
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| المؤلفون: | Floer, Cecile, Elmazria, Omar, Naumenko, Natalya, Bartoli, Florian, Ghanbaja, Jaafar, Aubert, Thierry, Hage-Ali, Sami |
| المساهمون: | Institut Jean Lamour (IJL), Institut de Chimie - CNRS Chimie (INC-CNRS)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), National University of Science and Technology (MISIS), Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Experiments were carried out at MiNaLor clean-room platform which is partially supported by FEDER and Grand Est Region through the RaNGE project and at IJL TUBE-Davm equipment which is funded by the French PIA project “Lorraine Université d’Excellence” (ANR-15-IDEX-04-LUE). This work was supported by the Direction Générale de l’Armement (DGA), the ANR project “SAWGOOD” (ANR-18-CE42-0004-01), the CAPMAT project (“FEDER-FSE Lorraine et Massif Vosges 2014-2020” and ICEEL), the Ministry of Science and Higher Education of the Russian Federation (075-02-2020-1588), and the National University of Science and Technology MISIS (K2-2020-007)., ANR-15-IDEX-0004,LUE,Isite LUE(2015), ANR-18-CE42-0004,SAWGOOD,Dispositifs sans fils étirables à ondes acoustiques de surface : vers des capteurs passifs multifonctionnels imprimés sur la peau(2018) |
| المصدر: | ISSN: 0885-3010. |
| بيانات النشر: | HAL CCSD Institute of Electrical and Electronics Engineers |
| سنة النشر: | 2021 |
| المجموعة: | Université de Lorraine: HAL |
| مصطلحات موضوعية: | Packageless, guided acoustic wave, temperature, [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], [PHYS]Physics [physics], [SPI]Engineering Sciences [physics], [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics |
| الوصف: | International audience |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| Relation: | hal-03169653; https://hal.science/hal-03169653; https://hal.science/hal-03169653/document; https://hal.science/hal-03169653/file/IEEE_TUFFC_FLOER_2021_clean_file_for_Xplore.pdf |
| DOI: | 10.1109/TUFFC.2021.3057269 |
| الاتاحة: | https://hal.science/hal-03169653 https://hal.science/hal-03169653/document https://hal.science/hal-03169653/file/IEEE_TUFFC_FLOER_2021_clean_file_for_Xplore.pdf https://doi.org/10.1109/TUFFC.2021.3057269 |
| Rights: | info:eu-repo/semantics/OpenAccess |
| رقم الانضمام: | edsbas.78BF6EA5 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1109/TUFFC.2021.3057269 |
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