Academic Journal
Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small angle X ray scattering
| العنوان: | Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small angle X ray scattering |
|---|---|
| المؤلفون: | Fernandez Herrero, A., Pflüger, M., Puls, J., Scholze, F., Soltwisch, V. |
| سنة النشر: | 2021 |
| المجموعة: | Helmholtz Zentrum Berlin (HZB): Publications |
| مصطلحات موضوعية: | Large scale facilities for research with photons neutrons and ions |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | unknown |
| Relation: | http://www.helmholtz-berlin.de/pubbin/oai_publication?VT=1&ID=104738 |
| الاتاحة: | http://www.helmholtz-berlin.de/pubbin/oai_publication?VT=1&ID=104738 |
| Rights: | info:eu-repo/semantics/openAccess |
| رقم الانضمام: | edsbas.74CFEB89 |
| قاعدة البيانات: | BASE |
| الوصف غير متاح. |