Academic Journal
High-resolution laboratory reflectometer for the study of x-ray optical elements in the soft and extreme ultraviolet wavelength ranges
| العنوان: | High-resolution laboratory reflectometer for the study of x-ray optical elements in the soft and extreme ultraviolet wavelength ranges |
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| المؤلفون: | Garakhin, S. A., Chkhalo, N. I., Kas’kov, I. A., Lopatin, A. Ya., Malyshev, I. V., Nechay, A. N., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Tsybin, N. N., Zabrodin, I. G., Zuev, S. Yu. |
| المساهمون: | Russian Foundation for Basic Research, The State Assignment for IPM RAS |
| المصدر: | Review of Scientific Instruments ; volume 91, issue 6 ; ISSN 0034-6748 1089-7623 |
| بيانات النشر: | AIP Publishing |
| سنة النشر: | 2020 |
| الوصف: | A high-resolution laboratory reflectometer designed for operation in the soft x-ray (SXR) and extreme ultraviolet (EUV) ranges is described. High spectral resolution, up to 0.028 nm, in a wide spectral range is achieved due to the Czerny–Turner monochromator. A laser plasma generated by irradiating a solid-state target with a focused laser beam (wavelength 1.06 µm, pulse energy 0.5 J, duration 4 ns, and pulse repetition rate 10 Hz) is used as a source of SXR and EUV radiation. The goniometer allows the study of curved optical elements with an aperture up to NA = 0.5 and a diameter of up to 500 mm. The methods providing high efficiency of the optical system and spectral resolution in a wide range of wavelengths are described in detail. The problem of taking into account high orders in the recorded spectra of a laser plasma is discussed. A comparison of the measurement results with the described reflectometer and the optics beamline at the BESSY-II synchrotron is given. |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1063/1.5144489 |
| DOI: | 10.1063/1.5144489/14087566/063103_1_online.pdf |
| الاتاحة: | http://dx.doi.org/10.1063/1.5144489 https://pubs.aip.org/aip/rsi/article-pdf/doi/10.1063/1.5144489/14087566/063103_1_online.pdf |
| رقم الانضمام: | edsbas.6E28BA99 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1063/1.5144489 |
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