A Novel Buckle-Free Large Rib Microdisk with Sub-Micron Thickness

التفاصيل البيبلوغرافية
العنوان: A Novel Buckle-Free Large Rib Microdisk with Sub-Micron Thickness
المؤلفون: Shahin Honari (14358309), Saeed Farajollahi (14358312), Tao Lu (39406)
سنة النشر: 2022
مصطلحات موضوعية: Physics (arXiv), physics.optics (arXiv)
الوصف: Thin large microdisks, that are key for dense spectral microcomb generation at visible to UV wavelengths, face challenges in fabrication. One of the most difficult issues is the buckling effect that significantly reduces the cavity optical quality factor. This work introduces a novel rib disk structure that significantly mitigates the buckling effects. Using this approach, we obtained millimeter size buckle-free microdisks with sub-micron thickness and high optical quality factor exceeding $10^7$.
نوع الوثيقة: report
اللغة: unknown
Relation: https://figshare.com/articles/preprint/A_Novel_Buckle-Free_Large_Rib_Microdisk_with_Sub-Micron_Thickness/21847506
DOI: 10.48550/arxiv.2205.08006
الاتاحة: https://doi.org/10.48550/arxiv.2205.08006
Rights: CC0
رقم الانضمام: edsbas.6CDF527B
قاعدة البيانات: BASE
الوصف
DOI:10.48550/arxiv.2205.08006