Report
The Study of an Integrated Sensor for Partial Nucleate Pool Boiling at Low Heat Flux
| العنوان: | The Study of an Integrated Sensor for Partial Nucleate Pool Boiling at Low Heat Flux |
|---|---|
| المؤلفون: | Jiang, Wenjing, Li, Zhigang, Zhao JF(赵建福), Du WF(杜王芳), Yuan, Hongtao |
| المساهمون: | Li, ZG (corresponding author), Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China. |
| سنة النشر: | 2022 |
| المجموعة: | IMECH-IR (Institute of Mechanics, Chinese Academy of Sciences) / 中国科学院力学研究所机构知识库 |
| مصطلحات موضوعية: | Microelectromechanical systems (MEMS) microchip, microheater, micro resistance temperature detector (RTD), partial nucleate pool boiling, Ti/Pt film, Engineering, Electrical & Electronic, Instruments & Instrumentation, Physics, Applied, 二类/Q1 |
| الوصف: | To study local convention and heat transfer around an isolated growing vapor bubble during nucleate pool boiling on a well characterized flat surface in microgravity, a microelectromechanical system (MEMS) sensor has been fabricated to pulse single bubble boiling. In this article, we present the design and fabrication process of an MEMS microchip, which can excite a bubble nucleus with accurate spatial and temporal positioning on the topside of the microchip, and meanwhile, the temperature on the heating surface around and underneath the growing bubble can be measured. The key points and difficulties of chip fabrication have been discussed, including the characteristics of the ultrathin Ti/Pt (10/35 nm) film, such as the effect of annealing on resistivity and its temperature coefficient of resistance (TCR). Then, the thermal cycling experiment has verified its stability. The results of the preliminary ground tests of the flight module SOBER SJ10 show that the microchip works well as expected and laid a good foundation for meeting the requirements of future space experiments. |
| نوع الوثيقة: | report |
| اللغة: | English |
| Relation: | IEEE SENSORS JOURNAL; http://dspace.imech.ac.cn/handle/311007/91870 |
| DOI: | 10.1109/JSEN.2022.3215680 |
| الاتاحة: | http://dspace.imech.ac.cn/handle/311007/91870 https://doi.org/10.1109/JSEN.2022.3215680 |
| Rights: | cn.org.cspace.api.content.CopyrightPolicy@252524c7 |
| رقم الانضمام: | edsbas.6AF6EFA |
| قاعدة البيانات: | BASE |
| DOI: | 10.1109/JSEN.2022.3215680 |
|---|