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Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

التفاصيل البيبلوغرافية
العنوان: Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices
المؤلفون: Ziba Torkashvand, Farzaneh Shayeganfar, Ali Ramazani
المصدر: Micromachines, Vol 15, Iss 2, p 175 (2024)
بيانات النشر: MDPI AG
سنة النشر: 2024
المجموعة: Directory of Open Access Journals: DOAJ Articles
مصطلحات موضوعية: micro-electromechanical systems, nanoelectromechanical systems, two-dimensional (2D) materials, sensors, accelerometers, microphones, Mechanical engineering and machinery, TJ1-1570
الوصف: The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles.
نوع الوثيقة: article in journal/newspaper
اللغة: English
تدمد: 2072-666X
Relation: https://www.mdpi.com/2072-666X/15/2/175; https://doaj.org/toc/2072-666X; https://doaj.org/article/65890dd3f2344d2a8f35386af26f72a9
DOI: 10.3390/mi15020175
الاتاحة: https://doi.org/10.3390/mi15020175
https://doaj.org/article/65890dd3f2344d2a8f35386af26f72a9
رقم الانضمام: edsbas.675C7E62
قاعدة البيانات: BASE
الوصف
تدمد:2072666X
DOI:10.3390/mi15020175