Conference
[Invited] Picosecond acoustics: from lab to fab
| العنوان: | [Invited] Picosecond acoustics: from lab to fab |
|---|---|
| المؤلفون: | Devos, Arnaud |
| المساهمون: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), Physique - IEMN (PHYSIQUE - IEMN), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA) |
| المصدر: | 8th International School of Sound and Light, SEL 2022 https://hal.science/hal-03774781 8th International School of Sound and Light, SEL 2022, Sep 2022, Saint-Pierre d'Oléron, France |
| بيانات النشر: | HAL CCSD |
| سنة النشر: | 2022 |
| المجموعة: | Université Polytechnique Hauts-de-France: HAL |
| مصطلحات موضوعية: | picosecond acoustics, thickness control, thin-film, elasticity, adhesion, RF filters, [SPI]Engineering Sciences [physics] |
| جغرافية الموضوع: | Saint-Pierre d'Oléron, France |
| الوصف: | International audience ; The main goal of this lecture is to give an outlook of the numerous and various applications that the picosecond acoustic technique has met in the industrial world. The story started a few years after its invention by Prof. H. Maris. Indeed, Rudolph Technologies (now ONTO) rapidly realized that such a technique was the missing one in the industrial world for controlling the thickness of thin metal films. That was the beginning of the Metapulse® story, a full automatized tool dedicated to microelectronics applications and that can be found in any production company worthy of the name. More recently, picosecond acoustics and especially its variant based on laser-tuning, the so-called Colored Picosecond Acoustics or APiC, have been shown to be very useful for many other industrial applications in topics as different as space mirror, radio-frequency filtering, flat and smart glass, solar cells,… |
| نوع الوثيقة: | conference object |
| اللغة: | English |
| Relation: | hal-03774781; https://hal.science/hal-03774781 |
| الاتاحة: | https://hal.science/hal-03774781 |
| رقم الانضمام: | edsbas.5CEC65E2 |
| قاعدة البيانات: | BASE |
| الوصف غير متاح. |