Academic Journal
Tailoring angular selectivity in SiO₂ slanted columnar thin films using atomic layer deposition of titanium nitride
| العنوان: | Tailoring angular selectivity in SiO₂ slanted columnar thin films using atomic layer deposition of titanium nitride |
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| المؤلفون: | Woodward-Gagné, Sasha, Desjardins-Lecavalier, Nicolas, Baloukas, Bill, Zabeida, Oleg, Martinu, Ludvik |
| بيانات النشر: | OSA |
| سنة النشر: | 2019 |
| المجموعة: | École Polytechnique de Montréal: PolyPublie |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | unknown |
| Relation: | Woodward-Gagné, S., Desjardins-Lecavalier, N., Baloukas, B., Zabeida, O., & Martinu, L. (2019). Tailoring angular selectivity in SiO₂ slanted columnar thin films using atomic layer deposition of titanium nitride. Optical Materials Express, 9(12), 4556-4563. |
| DOI: | 10.1364/ome.9.004556 |
| الاتاحة: | https://publications.polymtl.ca/44137/ https://doi.org/10.1364/ome.9.004556 |
| رقم الانضمام: | edsbas.5CB6798D |
| قاعدة البيانات: | BASE |
| DOI: | 10.1364/ome.9.004556 |
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