Academic Journal
A Pull‐in Based Test Mechanism for Device Diagnostic and Process Characterization
| العنوان: | A Pull‐in Based Test Mechanism for Device Diagnostic and Process Characterization |
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| المؤلفون: | Rocha, L. A., Mol, L., Cretu, E., Wolffenbuttel, R. F., Machado da Silva, J. |
| المساهمون: | Lubaszewski, Marcelo |
| المصدر: | VLSI Design ; volume 2008, issue 1 ; ISSN 1065-514X 1563-5171 |
| بيانات النشر: | Wiley |
| سنة النشر: | 2008 |
| المجموعة: | Wiley Online Library (Open Access Articles via Crossref) |
| الوصف: | A test technique for capacitive MEMS accelerometers and electrostatic microactuators, based on the measurement of pull‐in voltages and resonance frequency, is described. Using this combination of measurements, one can estimate process‐induced variations in the device layout dimensions as well as deviations from nominal value in material properties, which can be used either for testing or device diagnostics purposes. Measurements performed on fabricated devices confirm that the 250 nm overetch observed on SEM images can be correctly estimated using the proposed technique. |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1155/2008/283451 |
| الاتاحة: | https://doi.org/10.1155/2008/283451 http://downloads.hindawi.com/archive/2008/283451.pdf http://downloads.hindawi.com/archive/2008/283451.xml https://onlinelibrary.wiley.com/doi/pdf/10.1155/2008/283451 |
| Rights: | http://creativecommons.org/licenses/by/3.0/ |
| رقم الانضمام: | edsbas.5C884DDA |
| قاعدة البيانات: | BASE |
| DOI: | 10.1155/2008/283451 |
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