Academic Journal
Evolution of the structural, morphological, optical and electrical properties of reactively RF-sputtered cobalt oxide thin films with oxygen pressure
| العنوان: | Evolution of the structural, morphological, optical and electrical properties of reactively RF-sputtered cobalt oxide thin films with oxygen pressure |
|---|---|
| المؤلفون: | El Aakib, H, Pierson, Jean-François, Chaik, M, Samba Vall, C, Dads, H, Ait, Narjis, A, Outzourhit, A |
| المساهمون: | Université Cadi Ayyad Marrakech (UCA), Institut Jean Lamour (IJL), Institut de Chimie - CNRS Chimie (INC-CNRS)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS) |
| المصدر: | ISSN: 0042-207X ; Vacuum ; https://hal.science/hal-03372937 ; Vacuum, 2018, ⟨10.1016/j.vacuum.2018.10.065⟩. |
| بيانات النشر: | HAL CCSD Elsevier |
| سنة النشر: | 2018 |
| المجموعة: | Université de Lorraine: HAL |
| مصطلحات موضوعية: | Cobalt oxide thin films, reactive RF-sputtering, optical properties, structural properties, electrical properties. I, [SPI.MAT]Engineering Sciences [physics]/Materials, [CHIM.MATE]Chemical Sciences/Material chemistry |
| الوصف: | International audience ; Cobalt oxide thin films were deposited on glass and silicon substrates using reactive cathodic radio-frequency sputtering from a pure cobalt target in oxygen/argon gas mixtures with different percentages of oxygen (10, 30, 40 and 50 %). The X-ray diffractograms showed that deposited thin films crystallized in a cubic Co 3 O 4 phase. The crystallite size was found to vary with the oxygen pressure, reaching a maximum using 40 % of O 2. Scanning electron microscopy (SEM), AFM, energy dispersive X-ray spectroscopy and Raman scattering analyses confirmed the formation of Co 3 O 4 films with nano-sized particles. In addition, it is found that the optical band gap of the films increased with increasing oxygen pressure in the sputtering atmosphere. Finally, the electrical resistivity of the sputtered thin films was shown to increase with oxygen-percentage. |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1016/j.vacuum.2018.10.065 |
| الاتاحة: | https://hal.science/hal-03372937 https://hal.science/hal-03372937v1/document https://hal.science/hal-03372937v1/file/Paper_EL%20AAKIB_Vacuum%20final.pdf https://doi.org/10.1016/j.vacuum.2018.10.065 |
| Rights: | info:eu-repo/semantics/OpenAccess |
| رقم الانضمام: | edsbas.5618F27E |
| قاعدة البيانات: | BASE |
| DOI: | 10.1016/j.vacuum.2018.10.065 |
|---|