Academic Journal
Characterization of MEMS resonators via feedthrough de-embedding of harmonic and subharmonic pulsed-mode response
| العنوان: | Characterization of MEMS resonators via feedthrough de-embedding of harmonic and subharmonic pulsed-mode response |
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| المؤلفون: | Brenes, A., Juillard, J., Vinci Dos Santos, F., Bonnoit, A. |
| المصدر: | Sensors and Actuators A: Physical ; volume 229, page 211-217 ; ISSN 0924-4247 |
| بيانات النشر: | Elsevier BV |
| سنة النشر: | 2015 |
| المجموعة: | ScienceDirect (Elsevier - Open Access Articles via Crossref) |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1016/j.sna.2015.02.032 |
| الاتاحة: | http://dx.doi.org/10.1016/j.sna.2015.02.032 https://api.elsevier.com/content/article/PII:S0924424715000898?httpAccept=text/xml https://api.elsevier.com/content/article/PII:S0924424715000898?httpAccept=text/plain |
| Rights: | https://www.elsevier.com/tdm/userlicense/1.0/ |
| رقم الانضمام: | edsbas.549F537E |
| قاعدة البيانات: | BASE |
| DOI: | 10.1016/j.sna.2015.02.032 |
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