Conference
Développements de dépôts ALD : expériences et évaluations thermodynamiques
| العنوان: | Développements de dépôts ALD : expériences et évaluations thermodynamiques |
|---|---|
| المؤلفون: | Blanquet, E., Nuta, I., Brize, V., Boichot, R., Violet, P., Daniele, S. |
| المساهمون: | Science et Ingénierie des Matériaux et Procédés (SIMaP), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS), GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (GREMAN), Université de Tours (UT)-Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), Institut de recherches sur la catalyse et l'environnement de Lyon (IRCELYON), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS) |
| المصدر: | Matériaux 2010 ; https://hal.science/hal-00591214 ; Matériaux 2010, Oct 2010, NANTES, France |
| بيانات النشر: | CCSD |
| سنة النشر: | 2010 |
| المجموعة: | Université François-Rabelais de Tours: HAL |
| مصطلحات موضوعية: | [CHIM.MATE]Chemical Sciences/Material chemistry |
| جغرافية الموضوع: | NANTES, France |
| الوصف: | International audience |
| نوع الوثيقة: | conference object |
| اللغة: | English |
| الاتاحة: | https://hal.science/hal-00591214 |
| رقم الانضمام: | edsbas.53487E23 |
| قاعدة البيانات: | BASE |
| ResultId |
1 |
|---|---|
| Header |
edsbas BASE edsbas.53487E23 786 3 Conference conference 786.324340820313 |
| PLink |
https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsbas&AN=edsbas.53487E23&custid=s6537998&authtype=sso |
| FullText |
Array
(
[Availability] => 0
)
Array ( [0] => Array ( [Url] => https://hal.science/hal-00591214# [Name] => EDS - BASE [Category] => fullText [Text] => View record in BASE [MouseOverText] => View record in BASE ) ) |
| Items |
Array
(
[Name] => Title
[Label] => Title
[Group] => Ti
[Data] => Développements de dépôts ALD : expériences et évaluations thermodynamiques
)
Array ( [Name] => Author [Label] => Authors [Group] => Au [Data] => <searchLink fieldCode="AR" term="%22Blanquet%2C+E%2E%22">Blanquet, E.</searchLink><br /><searchLink fieldCode="AR" term="%22Nuta%2C+I%2E%22">Nuta, I.</searchLink><br /><searchLink fieldCode="AR" term="%22Brize%2C+V%2E%22">Brize, V.</searchLink><br /><searchLink fieldCode="AR" term="%22Boichot%2C+R%2E%22">Boichot, R.</searchLink><br /><searchLink fieldCode="AR" term="%22Violet%2C+P%2E%22">Violet, P.</searchLink><br /><searchLink fieldCode="AR" term="%22Daniele%2C+S%2E%22">Daniele, S.</searchLink> ) Array ( [Name] => Author [Label] => Contributors [Group] => Au [Data] => Science et Ingénierie des Matériaux et Procédés (SIMaP)<br />Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS)<br />GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (GREMAN)<br />Université de Tours (UT)-Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL)<br />Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)<br />Institut de recherches sur la catalyse et l'environnement de Lyon (IRCELYON)<br />Université Claude Bernard Lyon 1 (UCBL)<br />Université de Lyon-Université de Lyon-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS) ) Array ( [Name] => TitleSource [Label] => Source [Group] => Src [Data] => Matériaux 2010 ; https://hal.science/hal-00591214 ; Matériaux 2010, Oct 2010, NANTES, France ) Array ( [Name] => Publisher [Label] => Publisher Information [Group] => PubInfo [Data] => CCSD ) Array ( [Name] => DatePubCY [Label] => Publication Year [Group] => Date [Data] => 2010 ) Array ( [Name] => Subset [Label] => Collection [Group] => HoldingsInfo [Data] => Université François-Rabelais de Tours: HAL ) Array ( [Name] => Subject [Label] => Subject Terms [Group] => Su [Data] => <searchLink fieldCode="DE" term="%22[CHIM%2EMATE]Chemical+Sciences%2FMaterial+chemistry%22">[CHIM.MATE]Chemical Sciences/Material chemistry</searchLink> ) Array ( [Name] => Subject [Label] => Subject Geographic [Group] => Su [Data] => <searchLink fieldCode="DE" term="%22NANTES%22">NANTES</searchLink><br /><searchLink fieldCode="DE" term="%22France%22">France</searchLink> ) Array ( [Name] => Abstract [Label] => Description [Group] => Ab [Data] => International audience ) Array ( [Name] => TypeDocument [Label] => Document Type [Group] => TypDoc [Data] => conference object ) Array ( [Name] => Language [Label] => Language [Group] => Lang [Data] => English ) Array ( [Name] => URL [Label] => Availability [Group] => URL [Data] => https://hal.science/hal-00591214 ) Array ( [Name] => AN [Label] => Accession Number [Group] => ID [Data] => edsbas.53487E23 ) |
| RecordInfo |
Array
(
[BibEntity] => Array
(
[Languages] => Array
(
[0] => Array
(
[Text] => English
)
)
[Subjects] => Array
(
[0] => Array
(
[SubjectFull] => NANTES
[Type] => general
)
[1] => Array
(
[SubjectFull] => France
[Type] => general
)
[2] => Array
(
[SubjectFull] => [CHIM.MATE]Chemical Sciences/Material chemistry
[Type] => general
)
)
[Titles] => Array
(
[0] => Array
(
[TitleFull] => Développements de dépôts ALD : expériences et évaluations thermodynamiques
[Type] => main
)
)
)
[BibRelationships] => Array
(
[HasContributorRelationships] => Array
(
[0] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Blanquet, E.
)
)
)
[1] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Nuta, I.
)
)
)
[2] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Brize, V.
)
)
)
[3] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Boichot, R.
)
)
)
[4] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Violet, P.
)
)
)
[5] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Daniele, S.
)
)
)
[6] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Science et Ingénierie des Matériaux et Procédés (SIMaP)
)
)
)
[7] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS)
)
)
)
[8] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (GREMAN)
)
)
)
[9] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Université de Tours (UT)-Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL)
)
)
)
[10] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)
)
)
)
[11] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Institut de recherches sur la catalyse et l'environnement de Lyon (IRCELYON)
)
)
)
[12] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Université Claude Bernard Lyon 1 (UCBL)
)
)
)
[13] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Université de Lyon-Université de Lyon-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS)
)
)
)
)
[IsPartOfRelationships] => Array
(
[0] => Array
(
[BibEntity] => Array
(
[Dates] => Array
(
[0] => Array
(
[D] => 01
[M] => 01
[Type] => published
[Y] => 2010
)
)
[Identifiers] => Array
(
[0] => Array
(
[Type] => issn-locals
[Value] => edsbas
)
)
[Titles] => Array
(
[0] => Array
(
[TitleFull] => Matériaux 2010 ; https://hal.science/hal-00591214 ; Matériaux 2010, Oct 2010, NANTES, France
[Type] => main
)
)
)
)
)
)
)
|
| IllustrationInfo |