Academic Journal

Effect of air-loading on the performance limits of graphene microphones

التفاصيل البيبلوغرافية
العنوان: Effect of air-loading on the performance limits of graphene microphones
المؤلفون: Pezone, R., Baglioni, G., van Ruiten, C., Anzinger, S., Wasisto, H. S., Sarro, P. M., Steeneken, P. G., Vollebregt, S.
المساهمون: Graphene Flagship
المصدر: Applied Physics Letters ; volume 124, issue 12 ; ISSN 0003-6951 1077-3118
بيانات النشر: AIP Publishing
سنة النشر: 2024
الوصف: As a consequence of their high strength, small thickness, and high flexibility, ultrathin graphene membranes show great potential for pressure and sound sensing applications. This study investigates the performance of multi-layer graphene membranes for microphone applications in the presence of air-loading. Since microphones need a flatband response over the full audible bandwidth, they require a sufficiently high mechanical resonance frequency. Reducing membrane thickness facilitates meeting this bandwidth requirement, and therefore, also allows increasing compliance and sensitivity of the membranes. However, at atmospheric pressure, air-loading effects can increase the effective mass, and thus, reduce the bandwidth of graphene and other 2D material-based microphones. To assess the severity of this performance-limiting effect, we characterize the acoustic response of multi-layer graphene membranes with a thickness of 8 nm in the pressure range from 30 to 1000 mbar, in air and helium environments. A bandwidth reduction by a factor ∼2.8× for membranes with a diameter of 500 μm is observed. These measurements show that air-loading effects, which are usually negligible in conventional microphones, can lead to a substantial bandwidth reduction in ultrathin graphene microphones. With analytical and finite element models, we further analyze the performance limits of graphene microphones in the presence of air-loading effects.
نوع الوثيقة: article in journal/newspaper
اللغة: English
DOI: 10.1063/5.0191939
DOI: 10.1063/5.0191939/19834154/123503_1_5.0191939.pdf
الاتاحة: http://dx.doi.org/10.1063/5.0191939
https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/5.0191939/19834154/123503_1_5.0191939.pdf
رقم الانضمام: edsbas.459EBA29
قاعدة البيانات: BASE