Academic Journal
Profile retrieval of a buried periodic structure using spin echo grazing incidence neutron scattering ; Applied Physics Letters
| العنوان: | Profile retrieval of a buried periodic structure using spin echo grazing incidence neutron scattering ; Applied Physics Letters |
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| المؤلفون: | Ashkar, R., Dalgliesh, R. M., Pynn, R., Dunbar, A. D. F., Jones, R. A. L., Parnell, A. J. |
| المساهمون: | Physics |
| سنة النشر: | 2020 |
| المجموعة: | VTechWorks (VirginiaTech) |
| الوصف: | When the neutron scattering technique, Spin Echo Resolved Grazing Incidence Scattering (SERGIS) concept, was originally put forward by Rekveldt [Physica B 1135, 234-236 (1997)] and Felcher et al. [Proc. SPIE 4785, 164 (2002)], they recognized that the specular scattering and the off-specular scattering could be spatially separated due to the tight neutron beam collimation in the scattering plane, a necessity for any reflectometry experiment. In this Letter, we show that it is possible to make large area measurements of periodic grating structures using SERGIS in a number of interesting scenarios. The SERGIS data can be analyzed using a dynamical theory, which makes it possible to effectively retrieve the lateral profile of a commercial periodic diffraction grating. Interestingly, this is still the case even when that grating is buried beneath a highly deuterated poly(methyl methacrylate-D8) polymer layer. We also clearly demonstrate that the maximum sensitivity to lateral structures is achieved when the specular reflection from the grating is excluded from the data analysis, demonstrating a feature of SERGIS that was proposed over two decades ago. (C) 2020 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). ; STFCScience & Technology Facilities Council (STFC) [RB 1110285]; EPSRC Soft Nanotechnology Platform Grant [EP/E046215/1]; University of Sheffield ; The spin echo grazing incidence neutron experiments were supported by the STFC via the allocation of experimental time to use OffSpec (No. RB 1110285). A.J.P. was funded by the EPSRC Soft Nanotechnology Platform Grant (No. EP/E046215/1) and subsequently by a fellowship from the University of Sheffield. We thank Mr. Adam Hobson for assistance with the measurements on OffSpec. Dr. Nick Mullin helped with the AFM measurement of the annealed grating. A.J.P. is grateful to Dr. Steven Parnell for reading the draft manuscript and providing ... |
| نوع الوثيقة: | article in journal/newspaper still image |
| وصف الملف: | application/pdf |
| اللغة: | English |
| تدمد: | 0003-6951 1077-3118 |
| Relation: | 101602; http://hdl.handle.net/10919/101756; https://doi.org/10.1063/1.5140616; 116; 10 |
| DOI: | 10.1063/1.5140616 |
| الاتاحة: | http://hdl.handle.net/10919/101756 https://doi.org/10.1063/1.5140616 |
| Rights: | Creative Commons Attribution 4.0 International ; http://creativecommons.org/licenses/by/4.0/ |
| رقم الانضمام: | edsbas.41991BC8 |
| قاعدة البيانات: | BASE |
| تدمد: | 00036951 10773118 |
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| DOI: | 10.1063/1.5140616 |