Academic Journal

Lateral error compensation for stitching-free measurement with focus variation microscopy

التفاصيل البيبلوغرافية
العنوان: Lateral error compensation for stitching-free measurement with focus variation microscopy
المؤلفون: Syam, Wahyudin P., Santolaria, Jorge, Leach, Richard
بيانات النشر: IOP Publishing
سنة النشر: 2019
المجموعة: University of Nottingham: Repository@Nottingham
مصطلحات موضوعية: error compensation, focus variation microscopy, lateral motion stage, accuracy
الوصف: This paper proposes a practical methodology to quantify and compensate lateral errors for focus variation microscopy measurements without stitching. The main advantages of this new methodology are its fast and simple implementation using any uncalibrated artefact. The methodology is applied by performing measurements with multiple image-fields with and without stitching on an uncalibrated artefact and using the stitched measurements as reference. To quantify the lateral errors, the determination of their geometrical components is carried out through kinematic modelling. With the quantified errors, compensation can be applied for lateral measurements without stitching. Over the entire 200 mm lateral range, the lateral errors without stitching and without compensation can reach up to 180 µm. With the proposed error compensation methodology, the lateral errors have been reduced to around 15 µm. The proposed methodology can be applied to any Cartesian-based optical measuring instrument.
نوع الوثيقة: article in journal/newspaper
اللغة: unknown
تدمد: 0957-0233
Relation: https://nottingham-repository.worktribe.com/output/1522933; Measurement Science and Technology; Volume 30; Issue 6; https://nottingham-repository.worktribe.com/file/1522933/1/P%E9rez_2019_Meas._Sci._Technol._30_065002
DOI: 10.1088/1361-6501/ab046e
الاتاحة: https://doi.org/10.1088/1361-6501/ab046e
https://nottingham-repository.worktribe.com/file/1522933/1/P%E9rez_2019_Meas._Sci._Technol._30_065002
https://nottingham-repository.worktribe.com/output/1522933
Rights: openAccess ; http://creativecommons.org/licenses/by/3.0/
رقم الانضمام: edsbas.385A1808
قاعدة البيانات: BASE
الوصف
تدمد:09570233
DOI:10.1088/1361-6501/ab046e