التفاصيل البيبلوغرافية
| العنوان: |
Application of 3D glycerol-compensated inclined-exposure technology to an integrated optical pick-up head |
| المؤلفون: |
Hung, KY, Hu, HT, Tseng, FG |
| المساهمون: |
曾繁根 |
| بيانات النشر: |
Institute of Physics |
| سنة النشر: |
2004 |
| المجموعة: |
National Tsing Hua University Institutional Repository (NTHUR) |
| مصطلحات موضوعية: |
MICRO-FRESNEL LENS, DISK PICKUP, MICROOPTICS |
| Time: |
22 |
| الوصف: |
2060112010014 ; 工程與系統科學系 ; This paper proposes a novel method for integrating inclined mirrors with precise angles and smooth surfaces in on-chip Fresnel lens optical pick-up-head applications. A glycerol-compensated inclined-exposure technology was adopted for 45degrees mirror pair fabrication. This technology can fabricate 19-90degrees inclined structures onto SU-8 negative tone resist with thickness from 100 to 1000 mum. Glycerol is employed as an index matching material during exposure to compensate for the refractive index difference between the air and SU8, thus extending the possible inclined angles from 54degrees (in air) down to 19degrees (in glycerol). To eliminate reflected induced patterns, CK-6020L resist is employed as an antireflection layer. The surface roughness, measured by AFM, is below 7 nm for various inclined angles. Device fabrication has been successfully completed and test results demonstrated a functional VCSEL (vertical cavity surface emitting laser) beam focusing on a 5 mum spot. Further beam size reduction into the sub-micrometer range requires an objective lens with high numerical aperture, which is not within the scope of this paper. The fabricated optical components are robust and accurately aligned. This new integrated approach provides an easy and low-cost fabrication method for optical pick-up heads eliminating the need for manual assembly. |
| نوع الوثيقة: |
journal/newspaper |
| وصف الملف: |
107 bytes; text/html |
| اللغة: |
English |
| تدمد: |
0960-1317 |
| Relation: |
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Institute of Physics, Volume 14, Issue 7, JUL 2004, Pages 975-983; http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/47933 |
| الاتاحة: |
http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/47933 |
| رقم الانضمام: |
edsbas.3672228B |
| قاعدة البيانات: |
BASE |