Academic Journal
Ion Beam Modification of ZnO Epilayers: Sequential Processing
| العنوان: | Ion Beam Modification of ZnO Epilayers: Sequential Processing |
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| المؤلفون: | Turos, Andrzej, Ratajczak, Renata, Mieszczynski, Cyprian, Jozwik, Przemyslaw, Stonert, Anna, Prucnal, Slawomir, Heller, Rene, Skorupa, Wolfgang, von Borany, Johannes, Guziewicz, Elzbieta |
| المساهمون: | Polish National Centre for Research and Development, Polish Ministry of Science and Higher Education, Helmholtz Zentrum Dresden-Rossendorf (HZDR) |
| المصدر: | physica status solidi (a) ; volume 215, issue 16 ; ISSN 1862-6300 1862-6319 |
| بيانات النشر: | Wiley |
| سنة النشر: | 2018 |
| المجموعة: | Wiley Online Library (Open Access Articles via Crossref) |
| الوصف: | Defect agglomeration in ion‐implanted compound semiconductors produces lattice stress eventually causing plastic deformation at sufficiently high fluence. Consequently, a dislocations tangle is formed which can hardly be completely removed by thermal annealing. To solve this problem, a new method of sequential processing has been developed consisting of low fluence ion implantation followed by subsequent annealing. The procedure can be then repeated until the required impurity concentration has been reached without producing excessive damage. Epitaxial ZnO layers are grown using the atomic layer deposition (ALD) technique. Structural changes in ZnO epilayers due to Yb‐ion implantation and subsequent annealing are analyzed by Rutherford backscattering/channeling (RBS/c) and photoluminescence (PL). Correlation between defect transformations and PL efficiency is determined. Increased Yb‐atom optical activation upon sequential processing as compared to the standard single‐step annealing is observed. |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1002/pssa.201700887 |
| الاتاحة: | http://dx.doi.org/10.1002/pssa.201700887 https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fpssa.201700887 https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.201700887 |
| Rights: | http://onlinelibrary.wiley.com/termsAndConditions#vor |
| رقم الانضمام: | edsbas.35AEFB7 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1002/pssa.201700887 |
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