Academic Journal
Optical properties of highly n-doped germanium obtained by in situ doping and laser annealing
| العنوان: | Optical properties of highly n-doped germanium obtained by in situ doping and laser annealing |
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| المؤلفون: | Frigerio, J., Ballabio, A., Gallacher, K., Gilberti, V., Baldassarre, L., Millar, R., Milazzo, R., Maiolo, L., Minotti, A., Bottegoni, F., Biagioni, P., Paul, D., Ortolani, M., Pecora, A., Napolitani, E., Isella, G. |
| المساهمون: | Frigerio, J., Ballabio, A., Gallacher, K., Gilberti, V., Baldassarre, L., Millar, R., Milazzo, R., Maiolo, L., Minotti, A., Bottegoni, F., Biagioni, P., Paul, D., Ortolani, M., Pecora, A., Napolitani, E., Isella, G. |
| سنة النشر: | 2017 |
| المجموعة: | RE.PUBLIC@POLIMI - Research Publications at Politecnico di Milano |
| مصطلحات موضوعية: | doping, germanium, laser annealing, mid infrared, plasmonic, silicon photonic, Electronic, Optical and Magnetic Material, Condensed Matter Physic, Acoustics and Ultrasonic, Surfaces, Coatings and Films |
| الوصف: | High n-type doping in germanium is essential for many electronic and optoelectronic applications especially for high performance Ohmic contacts, lasing and mid-infrared plasmonics. We report on the combination of in situ doping and excimer laser annealing to improve the activation of phosphorous in germanium. An activated n-doping concentration of 8.8 × 1019cm-3has been achieved starting from an incorporated phosphorous concentration of 1.1 × 1020cm-3. Infrared reflectivity data fitted with a multi-layer Drude model indicate good uniformity over a 350 nm thick layer. Photoluminescence demonstrates clear bandgap narrowing and an increased ratio of direct to indirect bandgap emission confirming the high doping densities achieved. |
| نوع الوثيقة: | article in journal/newspaper |
| وصف الملف: | STAMPA |
| اللغة: | English |
| Relation: | info:eu-repo/semantics/altIdentifier/wos/WOS:000415638300002; volume:50; issue:46; firstpage:1; lastpage:7; numberofpages:7; journal:JOURNAL OF PHYSICS D. APPLIED PHYSICS; info:eu-repo/grantAgreement/EC/FP7/613055; http://hdl.handle.net/11311/1036380; info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-85032788083; http://iopscience.iop.org/article/10.1088/1361-6463/aa8eca/pdf |
| DOI: | 10.1088/1361-6463/aa8eca |
| DOI: | 10.1088/1361-6463/aa8eca/pdf |
| الاتاحة: | http://hdl.handle.net/11311/1036380 https://doi.org/10.1088/1361-6463/aa8eca http://iopscience.iop.org/article/10.1088/1361-6463/aa8eca/pdf |
| Rights: | info:eu-repo/semantics/openAccess |
| رقم الانضمام: | edsbas.359E5F4C |
| قاعدة البيانات: | BASE |
| DOI: | 10.1088/1361-6463/aa8eca |
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