Academic Journal
Smoothing of microfabricated silicon features by thermal annealing in reducing or inert atmospheres
| العنوان: | Smoothing of microfabricated silicon features by thermal annealing in reducing or inert atmospheres |
|---|---|
| المؤلفون: | Kolari, K, Vehmas, T, Svensk, O, Törmä, P, Aalto, T |
| المصدر: | Physica Scripta ; volume T141, page 014017 ; ISSN 0031-8949 1402-4896 |
| بيانات النشر: | IOP Publishing |
| سنة النشر: | 2010 |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | unknown |
| DOI: | 10.1088/0031-8949/2010/t141/014017 |
| الاتاحة: | http://dx.doi.org/10.1088/0031-8949/2010/t141/014017 http://stacks.iop.org/1402-4896/2010/i=T141/a=014017/pdf |
| رقم الانضمام: | edsbas.28C2B463 |
| قاعدة البيانات: | BASE |
| ResultId |
1 |
|---|---|
| Header |
edsbas BASE edsbas.28C2B463 771 3 Academic Journal academicJournal 771.324340820313 |
| PLink |
https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsbas&AN=edsbas.28C2B463&custid=s6537998&authtype=sso |
| FullText |
Array
(
[Availability] => 0
)
Array ( [0] => Array ( [Url] => http://dx.doi.org/10.1088/0031-8949/2010/t141/014017# [Name] => EDS - BASE [Category] => fullText [Text] => View record in BASE [MouseOverText] => View record in BASE ) ) |
| Items |
Array
(
[Name] => Title
[Label] => Title
[Group] => Ti
[Data] => Smoothing of microfabricated silicon features by thermal annealing in reducing or inert atmospheres
)
Array ( [Name] => Author [Label] => Authors [Group] => Au [Data] => <searchLink fieldCode="AR" term="%22Kolari%2C+K%22">Kolari, K</searchLink><br /><searchLink fieldCode="AR" term="%22Vehmas%2C+T%22">Vehmas, T</searchLink><br /><searchLink fieldCode="AR" term="%22Svensk%2C+O%22">Svensk, O</searchLink><br /><searchLink fieldCode="AR" term="%22Törmä%2C+P%22">Törmä, P</searchLink><br /><searchLink fieldCode="AR" term="%22Aalto%2C+T%22">Aalto, T</searchLink> ) Array ( [Name] => TitleSource [Label] => Source [Group] => Src [Data] => Physica Scripta ; volume T141, page 014017 ; ISSN 0031-8949 1402-4896 ) Array ( [Name] => Publisher [Label] => Publisher Information [Group] => PubInfo [Data] => IOP Publishing ) Array ( [Name] => DatePubCY [Label] => Publication Year [Group] => Date [Data] => 2010 ) Array ( [Name] => TypeDocument [Label] => Document Type [Group] => TypDoc [Data] => article in journal/newspaper ) Array ( [Name] => Language [Label] => Language [Group] => Lang [Data] => unknown ) Array ( [Name] => DOI [Label] => DOI [Group] => ID [Data] => 10.1088/0031-8949/2010/t141/014017 ) Array ( [Name] => URL [Label] => Availability [Group] => URL [Data] => http://dx.doi.org/10.1088/0031-8949/2010/t141/014017<br />http://stacks.iop.org/1402-4896/2010/i=T141/a=014017/pdf ) Array ( [Name] => AN [Label] => Accession Number [Group] => ID [Data] => edsbas.28C2B463 ) |
| RecordInfo |
Array
(
[BibEntity] => Array
(
[Identifiers] => Array
(
[0] => Array
(
[Type] => doi
[Value] => 10.1088/0031-8949/2010/t141/014017
)
)
[Languages] => Array
(
[0] => Array
(
[Text] => unknown
)
)
[Titles] => Array
(
[0] => Array
(
[TitleFull] => Smoothing of microfabricated silicon features by thermal annealing in reducing or inert atmospheres
[Type] => main
)
)
)
[BibRelationships] => Array
(
[HasContributorRelationships] => Array
(
[0] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Kolari, K
)
)
)
[1] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Vehmas, T
)
)
)
[2] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Svensk, O
)
)
)
[3] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Törmä, P
)
)
)
[4] => Array
(
[PersonEntity] => Array
(
[Name] => Array
(
[NameFull] => Aalto, T
)
)
)
)
[IsPartOfRelationships] => Array
(
[0] => Array
(
[BibEntity] => Array
(
[Dates] => Array
(
[0] => Array
(
[D] => 01
[M] => 01
[Type] => published
[Y] => 2010
)
)
[Identifiers] => Array
(
[0] => Array
(
[Type] => issn-locals
[Value] => edsbas
)
)
[Titles] => Array
(
[0] => Array
(
[TitleFull] => Physica Scripta ; volume T141, page 014017 ; ISSN 0031-8949 1402-4896
[Type] => main
)
)
)
)
)
)
)
|
| IllustrationInfo |