Conference
Trap identification on n-channel GAA NW FETs
| العنوان: | Trap identification on n-channel GAA NW FETs |
|---|---|
| المؤلفون: | Bordin, A., Cretu, B., Carin, R., Simoen, Eddy, Hellings, G., Linten, D., Claeys, C. |
| المصدر: | 2020 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Proceedings ; ISSN: 2330-5738 ; ISSN: 2472-9132 ; ISBN: 9781728187662 ; ISBN: 9781728187655 |
| سنة النشر: | 2020 |
| المجموعة: | Ghent University Academic Bibliography |
| مصطلحات موضوعية: | Physics and Astronomy, GAA NW FET, low frequency noise, generation-recombination noise, low frequency noise spectroscopy |
| الوصف: | In this work, low frequency noise spectroscopy is performed on n-channel gate all around (GAA) nanowire (NW) FETs. The study of generation-recombination noise at fixed temperature as a function of the applied bias suggests the existence of traps located in the depleted Si film. The temperature evolution of the generation-recombination noise at fixed polarization allows constructing an Arrhenius diagram from which a hydrogen related trap was identified. Moreover, it is suggested that it is more suitable to use the surface trap density as a figure of merit. |
| نوع الوثيقة: | conference object |
| وصف الملف: | application/pdf |
| اللغة: | English |
| ردمك: | 978-1-72818-766-2 978-1-72818-765-5 1-72818-766-4 1-72818-765-6 |
| Relation: | https://biblio.ugent.be/publication/8708507; http://hdl.handle.net/1854/LU-8708507; http://dx.doi.org/10.1109/eurosoi-ulis49407.2020.9365281; https://biblio.ugent.be/publication/8708507/file/8708509 |
| DOI: | 10.1109/eurosoi-ulis49407.2020.9365281 |
| الاتاحة: | https://biblio.ugent.be/publication/8708507 http://hdl.handle.net/1854/LU-8708507 https://doi.org/10.1109/eurosoi-ulis49407.2020.9365281 https://biblio.ugent.be/publication/8708507/file/8708509 |
| Rights: | No license (in copyright) ; info:eu-repo/semantics/restrictedAccess |
| رقم الانضمام: | edsbas.23975158 |
| قاعدة البيانات: | BASE |
| ردمك: | 9781728187662 9781728187655 1728187664 1728187656 |
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| DOI: | 10.1109/eurosoi-ulis49407.2020.9365281 |