Academic Journal
Effect of the deposition gas pressure on the structure and mechanical stability of sputtered amorphous carbon nitride films
| العنوان: | Effect of the deposition gas pressure on the structure and mechanical stability of sputtered amorphous carbon nitride films |
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| المؤلفون: | Peponas, S., Lejeune, M., Charvet, S., Guedda, M., Benlahsen, M. |
| المصدر: | Surface and Coatings Technology ; volume 212, page 229-233 ; ISSN 0257-8972 |
| بيانات النشر: | Elsevier BV |
| سنة النشر: | 2012 |
| المجموعة: | ScienceDirect (Elsevier - Open Access Articles via Crossref) |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1016/j.surfcoat.2012.09.054 |
| الاتاحة: | http://dx.doi.org/10.1016/j.surfcoat.2012.09.054 https://api.elsevier.com/content/article/PII:S0257897212009322?httpAccept=text/xml https://api.elsevier.com/content/article/PII:S0257897212009322?httpAccept=text/plain |
| Rights: | https://www.elsevier.com/tdm/userlicense/1.0/ |
| رقم الانضمام: | edsbas.2120F6F0 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1016/j.surfcoat.2012.09.054 |
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