Academic Journal
Characterization of Al2O3 Thin Films Prepared by Thermal ALD
| العنوان: | Characterization of Al2O3 Thin Films Prepared by Thermal ALD |
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| المؤلفون: | Barbos, Corina, Blanc-Pelissier, Danièle, Fave, Alain, Blanquet, Elisabeth, Crisci, Alexandre, Fourmond, Erwann, Albertini, David, Sabac, Andreï, Ayadi, Khaled, Girard, Philippe, Lemiti, Mustapha |
| المصدر: | Energy Procedia ; volume 77, page 558-564 ; ISSN 1876-6102 |
| بيانات النشر: | Elsevier BV |
| سنة النشر: | 2015 |
| المجموعة: | ScienceDirect (Elsevier - Open Access Articles via Crossref) |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1016/j.egypro.2015.07.080 |
| الاتاحة: | http://dx.doi.org/10.1016/j.egypro.2015.07.080 https://api.elsevier.com/content/article/PII:S1876610215008486?httpAccept=text/xml https://api.elsevier.com/content/article/PII:S1876610215008486?httpAccept=text/plain |
| Rights: | https://www.elsevier.com/tdm/userlicense/1.0/ ; http://creativecommons.org/licenses/by-nc-nd/4.0/ |
| رقم الانضمام: | edsbas.1F0DC12 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1016/j.egypro.2015.07.080 |
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