Conference
Detection efficiency and spatial resolution of the SIRAD ion electron emission microscope
| العنوان: | Detection efficiency and spatial resolution of the SIRAD ion electron emission microscope |
|---|---|
| المؤلفون: | Mattiazzo, S. |
| المساهمون: | István Rajta, Árpád Z. Kiss, Zsófia Kertész, Zita Szikszai, Alíz Simon, Bisello, D., Giubilato, P., Kaminsky, A., Mattiazzo, Serena, Nigro, M., Pantano, D., Silvestrin, L., Tessaro, M., Wyss, J., Bertazzoni, S., Mongiardo, L., Salmeri, M., Salsano, A. |
| بيانات النشر: | Elsevier Ltd. NL Amsterdam |
| سنة النشر: | 2009 |
| المجموعة: | Aisberg - Archivio istituzionale dell'Università di Bergamo |
| مصطلحات موضوعية: | Ion electron emission microscopy, Single event effects, Settore FIS/01 - Fisica Sperimentale |
| الوصف: | An axial ion electron emission microscope (IEEM) has been built at the SIRAD irradiation facility at the 15 MV Tandem accelerator of INFN Legnaro National Laboratory (Padova, Italy) to obtain a micrometric sensitivity map to single event effects (SEE) of electronic devices. In this contribution we report on two experiments performed with the IEEM. Si3N4 ultra-thin membranes with a gold deposition were placed on the device under test (DUT) to ensure a uniform and abundant secondary electron emission In the first experiment we measured an IEEM ion detection efficiency of 83% with a 58Ni (220 MeV) beam, in good agreement with the expected value. The second experiment allowed us to estimate the lateral resolution of the IEEM. The positions of ion induced single event upsets (SEU) in a synchronous dynamic random access memory (SDRAM), used as a reference target, were compared with the corresponding ion impact points reconstructed by the IEEM. The result (FWHM ∼4.4 μm with a 79Br beam of 214 MeV) is encouraging because of the residual presence of distortions of the image and mechanical vibrations. |
| نوع الوثيقة: | conference object |
| وصف الملف: | remote |
| اللغة: | English |
| Relation: | info:eu-repo/semantics/altIdentifier/wos/WOS:000267910500064; ispartofbook:Proceedings of the 11th International Conference on Nuclear Microprobe Technology and Applications and the 3rd International Workshop on Proton Beam Writing (ICNMTA2008 and PBW III); International Conference on Nuclear Microprobe Technology and Applications and the 3rd International Workshop on Proton Beam Writing; volume:267; issue:12-13; firstpage:2269; lastpage:2272; journal:NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS; alleditors:István Rajta, Árpád Z. Kiss, Zsófia Kertész, Zita Szikszai, Alíz Simon; http://hdl.handle.net/10446/187193; info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-66349116142 |
| DOI: | 10.1016/j.nimb.2009.03.048 |
| الاتاحة: | http://hdl.handle.net/10446/187193 https://doi.org/10.1016/j.nimb.2009.03.048 |
| Rights: | info:eu-repo/semantics/closedAccess |
| رقم الانضمام: | edsbas.19E390C |
| قاعدة البيانات: | BASE |
| DOI: | 10.1016/j.nimb.2009.03.048 |
|---|