Academic Journal

New Copolymers of Dialkyl Fumarates with Norbornene Derivatives for Sub-0.2 µm Lithography at a Wavelength of 193 nm: Synthesis and Thermal and Photochemical Transformations

التفاصيل البيبلوغرافية
العنوان: New Copolymers of Dialkyl Fumarates with Norbornene Derivatives for Sub-0.2 µm Lithography at a Wavelength of 193 nm: Synthesis and Thermal and Photochemical Transformations
المؤلفون: Vainer, A. Ya., Dyumaev, K. M., Eremina, L. A., Tamarkina, R. V., Ternovskii, E. P., Shvartsburg, L. M.
المصدر: Doklady Physical Chemistry ; volume 404, issue 1-3, page 159-161 ; ISSN 0012-5016 1608-3121
بيانات النشر: Springer Science and Business Media LLC
سنة النشر: 2005
نوع الوثيقة: article in journal/newspaper
اللغة: English
DOI: 10.1007/s10634-005-0049-9
DOI: 10.1007/s10634-005-0049-9.pdf
DOI: 10.1007/s10634-005-0049-9/fulltext.html
الاتاحة: http://dx.doi.org/10.1007/s10634-005-0049-9
http://link.springer.com/content/pdf/10.1007/s10634-005-0049-9.pdf
http://link.springer.com/article/10.1007/s10634-005-0049-9/fulltext.html
http://link.springer.com/content/pdf/10.1007/s10634-005-0049-9
Rights: http://www.springer.com/tdm
رقم الانضمام: edsbas.14301587
قاعدة البيانات: BASE
الوصف
DOI:10.1007/s10634-005-0049-9