Academic Journal
Effects of methyl terminal and carbon bridging groups ratio on critical properties of porous organosilicate-glass films
| العنوان: | Effects of methyl terminal and carbon bridging groups ratio on critical properties of porous organosilicate-glass films |
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| المؤلفون: | Vishnevskiy, Alexey S., Naumov, Sergej, Seregin, Dmitry S., Wu, Yu-Hsuan, Chuang, Wei-Tsung, Rasadujjaman, Md., Zhang, Jing, Leu, Jihperng, Vorotilov, Konstantin A., Baklanov, Mikhail R. |
| بيانات النشر: | MDPI |
| سنة النشر: | 2020 |
| المجموعة: | LeibnizOpen (The Leibniz Association) |
| مصطلحات موضوعية: | Carbon bridges, Density functional theory (DFT), Ellipsometric porosimetry, FTIR, GISAXS, Low-k films, Organosilicate glass, Pore morphology, Pore structure, Young’s modulus |
| Time: | 600 |
| الوصف: | Organosilicate glass-based porous low dielectic constant films with different ratios of terminal methyl to bridging organic (methylene, ethylene and 1,4-phenylene) groups are spin-on deposited by using a mixture of alkylenesiloxane with organic bridges and methyltrimethoxysilane, followed by soft baking at 120–200◦ C and curing at 430◦ C. The films’ porosity was controlled by using sacrificial template Brij® L4. Changes of the films’ refractive indices, mechanical properties, k-values, porosity and pore structure versus chemical composition of the film’s matrix are evaluated and compared with methyl-terminated low-k materials. The chemical resistance of the films to annealing in oxygen-containing atmosphere is evaluated by using density functional theory (DFT). It is found that the introduction of bridging groups changes their porosity and pore structure, increases Young’s modulus, but the improvement of mechanical properties happens simultaneously with the increase in the refractive index and k-value. The 1,4-phenylene bridging groups have the strongest impact on the films’ properties. Mechanisms of oxidative degradation of carbon bridges are studied and it is shown that 1,4-phenylene-bridged films have the highest stability. Methylene-and ethylene-bridged films are less stable but methylene-bridged films show slightly higher stability than ethylene-bridged films. © 2020 by the authors. Licensee MDPI, Basel, Switzerland. ; publishedVersion |
| نوع الوثيقة: | article in journal/newspaper |
| وصف الملف: | application/pdf |
| اللغة: | English |
| DOI: | 10.34657/9547 |
| الاتاحة: | https://oa.tib.eu/renate/handle/123456789/10511 https://doi.org/10.34657/9547 |
| Rights: | CC BY 4.0 Unported ; https://creativecommons.org/licenses/by/4.0/ |
| رقم الانضمام: | edsbas.12CA3EDB |
| قاعدة البيانات: | BASE |
| DOI: | 10.34657/9547 |
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