Academic Journal
Molecular dynamics approach for the calculation of the surface loss probabilities of neutral species in argon-methane plasma
| العنوان: | Molecular dynamics approach for the calculation of the surface loss probabilities of neutral species in argon-methane plasma |
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| المؤلفون: | Otakandza-Kandjani, Glenn‐christopher, Brault, Pascal, Mikikian, Maxime, Michau, Armelle, Hassouni, Khaled |
| المساهمون: | Groupe de recherches sur l'énergétique des milieux ionisés (GREMI), Université d'Orléans (UO)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des Sciences des Procédés et des Matériaux (LSPM), Institut Galilée-Université Sorbonne Paris Cité (USPC)-Centre National de la Recherche Scientifique (CNRS)-Université Sorbonne Paris Nord, National Scholarship Agency of Gabon (ANBG), Fédération Calcul Scientifique et Modélisation Orléans Tours (CaSciModOT), ANR-18-CE30-0016,MONA,De la MOlécule à la NAnoparticule : Couplage expériences/modèles pour révéler la physico-chimie complexe des plasmas hydrocarbonés(2018) |
| المصدر: | ISSN: 1612-8850. |
| بيانات النشر: | HAL CCSD Wiley-VCH Verlag |
| سنة النشر: | 2024 |
| المجموعة: | Université Paris 13: HAL |
| مصطلحات موضوعية: | molecular dynamics, sticking probability, surface recombination probability, surface loss probability, hydrocarbon plasma, C:H film, [PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph], [CHIM.THEO]Chemical Sciences/Theoretical and/or physical chemistry |
| الوصف: | International audience ; Molecular dynamics simulations are carried out for calculating the surface loss probabilities of neutral species from an argon-methane plasma. These probabilities are the sum of the sticking and surface recombination probabilities. This study considers both the formation of reactive and nonreactive volatile species for evaluating recombination probabilities. Results show that stable species are reflected when hydrocarbon film starts growing on the surface. CH3 is mainly lost by surface recombination leading to formation of volatile products while very little contributes to film growth. C2H has surface loss probability in agreement with literature. While C2H loss is usually attributed to sticking on the surface, our results show that its main loss process is due to surface recombination. |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| Relation: | hal-04176502; https://hal.science/hal-04176502; https://hal.science/hal-04176502v2/document; https://hal.science/hal-04176502v2/file/ppap202300120_23.pdf |
| DOI: | 10.1002/ppap.202300120 |
| الاتاحة: | https://hal.science/hal-04176502 https://hal.science/hal-04176502v2/document https://hal.science/hal-04176502v2/file/ppap202300120_23.pdf https://doi.org/10.1002/ppap.202300120 |
| Rights: | info:eu-repo/semantics/OpenAccess |
| رقم الانضمام: | edsbas.11A41C56 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1002/ppap.202300120 |
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