Report
Investigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer
| العنوان: | Investigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer |
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| المؤلفون: | Porokhov, N. V., Sirotina, A. P., Pershina, E. A., Shibalov, M. V., Diudbin, G. D., Mumlyakov, A. V., Timofeeva, E. R., Trofimov, I. V., Tagachenkov, A. M., Anufriev, Yu. V., Zenova, E. V., Tarkhov, M. A. |
| سنة النشر: | 2021 |
| المجموعة: | Condensed Matter |
| مصطلحات موضوعية: | Condensed Matter - Superconductivity |
| الوصف: | The influence of the buffer layer of hafnia dielectric on superconducting properties of niobium nitride films, produced by the technique of the reactive magnetron depositing has been investigated for the first time. This study presents a comprehensive analysis of morphological, microstructural, and electrophysical parameters of thin NbN films. Comment: 14 pages, 6 figures |
| نوع الوثيقة: | Working Paper |
| DOI: | 10.1088/1361-6668/ac216a |
| URL الوصول: | http://arxiv.org/abs/2106.15680 |
| رقم الانضمام: | edsarx.2106.15680 |
| قاعدة البيانات: | arXiv |
| DOI: | 10.1088/1361-6668/ac216a |
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