Report
Numerical Modeling of MEMS Resonators
| العنوان: | Numerical Modeling of MEMS Resonators |
|---|---|
| المؤلفون: | Chorsi, Hamid T., Chorsi, Meysam T., Gedney, Stephen D. |
| سنة النشر: | 2016 |
| المجموعة: | Condensed Matter |
| مصطلحات موضوعية: | Condensed Matter - Mesoscale and Nanoscale Physics |
| الوصف: | Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an analytical method. |
| نوع الوثيقة: | Working Paper |
| URL الوصول: | http://arxiv.org/abs/1611.05310 |
| رقم الانضمام: | edsarx.1611.05310 |
| قاعدة البيانات: | arXiv |
| الوصف غير متاح. |