InAs nanowire transistors with multiple, independent wrap-gate segments

التفاصيل البيبلوغرافية
العنوان: InAs nanowire transistors with multiple, independent wrap-gate segments
المؤلفون: Burke, A. M., Carrad, D. J., Gluschke, J. G., Storm, K., Svensson, S. Fahlvik, Linke, H., Samuelson, L., Micolich, A. P.
سنة النشر: 2015
المجموعة: Condensed Matter
مصطلحات موضوعية: Condensed Matter - Mesoscale and Nanoscale Physics
الوصف: We report a method for making horizontal wrap-gate nanowire transistors with up to four independently controllable wrap-gated segments. While the step up to two independent wrap-gates requires a major change in fabrication methodology, a key advantage to this new approach, and the horizontal orientation more generally, is that achieving more than two wrap-gate segments then requires no extra fabrication steps. This is in contrast to the vertical orientation, where a significant subset of the fabrication steps needs to be repeated for each additional gate. We show that cross-talk between adjacent wrap-gate segments is negligible despite separations less than 200 nm. We also demonstrate the ability to make multiple wrap-gate transistors on a single nanowire using the exact same process. The excellent scalability potential of horizontal wrap-gate nanowire transistors makes them highly favourable for the development of advanced nanowire devices and possible integration with vertical wrap-gate nanowire transistors in 3D nanowire network architectures.
Comment: 18 pages, 5 figures, In press for Nano Letters (DOI below)
نوع الوثيقة: Working Paper
DOI: 10.1021/nl5043243
URL الوصول: http://arxiv.org/abs/1505.01689
رقم الانضمام: edsarx.1505.01689
قاعدة البيانات: arXiv