Reduction of optical reflection from InP semiconductor wafers after high-temperature annealing

التفاصيل البيبلوغرافية
العنوان: Reduction of optical reflection from InP semiconductor wafers after high-temperature annealing
المؤلفون: Semyonov, Oleg G., Subashiev, Arsen V., Shabalov, Alexander, Lifshitz, Nadia, Chen, Zhichao, Hosoda, Takashi, Luryi, Serge
سنة النشر: 2011
المجموعة: Condensed Matter
Physics (Other)
مصطلحات موضوعية: Condensed Matter - Materials Science, Physics - Optics
الوصف: We observed and studied strong reduction of optical reflection from the surface of InP wafers after high-temperature annealing. The effect is observed over a wide range of the incident wavelengths, and in the transparency band of the material it is accompanied by increasing transmission. The spectral position of a minimum (almost zero) of the reflection coefficient can be tuned, by varying the temperature and the time of annealing, in the spectral range between 0.5 and 6 eV. The effect is explained by the formation of a uniform oxide layer, whose parameters (thicknesses and average index) are estimated by detailed modeling.
Comment: 20 pages, 11 figures, submitted to Journal of Applied physics
نوع الوثيقة: Working Paper
URL الوصول: http://arxiv.org/abs/1112.5398
رقم الانضمام: edsarx.1112.5398
قاعدة البيانات: arXiv