Modifying surface properties of diamond-like carbon films via nanotexturing
| العنوان: | Modifying surface properties of diamond-like carbon films via nanotexturing |
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| المؤلفون: | M. Rubio-Roy, Jordi Ignés-Mullol, C. Corbella, Gerard Oncins, J.L. Andújar, M.A. Vallvé, S. Portal-Marco, Enric Bertran |
| المساهمون: | FEMAN (FEMAN), Universitat de Barcelona (UB), Serveis Cientificotècnics (SCT), SOC&SAM Group, Rubio-Roy, Miguel |
| المصدر: | Journal of Physics D: Applied Physics Journal of Physics D: Applied Physics, IOP Publishing, 2011, 44 (39), pp.395301 HAL |
| بيانات النشر: | HAL CCSD, 2011. |
| سنة النشر: | 2011 |
| مصطلحات موضوعية: | Materials science, Acoustics and Ultrasonics, Nanotechnology, [PHYS.MECA.MSMECA] Physics [physics]/Mechanics [physics]/Materials and structures in mechanics [physics.class-ph], 02 engineering and technology, Chemical vapor deposition, [SPI.MAT] Engineering Sciences [physics]/Materials, 010402 general chemistry, 01 natural sciences, [SPI.MECA.MEMA] Engineering Sciences [physics]/Mechanics [physics.med-ph]/Mechanics of materials [physics.class-ph], Nanoimprint lithography, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, Contact angle, law, Etching (microfabrication), [SPI.MECA.MEMA]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Mechanics of materials [physics.class-ph], Thin film, Lithography, ComputingMilieux_MISCELLANEOUS, business.industry, [PHYS.MECA.MSMECA]Physics [physics]/Mechanics [physics]/Materials and structures in mechanics [physics.class-ph], 021001 nanoscience & nanotechnology, Condensed Matter Physics, [PHYS.COND.CM-MS] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Carbon film, Amorphous carbon, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, 0210 nano-technology, business |
| الوصف: | Diamond-like amorphous carbon (DLC) films have been grown by pulsed-dc plasma-enhanced chemical vapour deposition on silicon wafers, which were previously patterned by means of colloidal lithography. The substrate conditioning comprised two steps: first, deposition of a self-assembled monolayer of silica sub-micrometre spheres (∼300 nm) on monocrystalline silicon (∼5 cm2) by Langmuir–Blodgett technique, which acted as lithography template; second, substrate patterning via ion beam etching (argon) of the colloid samples (550 eV) at different incidence angles. The plasma deposition of a DLC thin film on the nanotextured substrates resulted in hard coatings with distinctly different surface properties compared with planar DLC. Also, in-plane anisotropy was generated depending on the etching angle. The samples were morphologically characterized by scanning electron microscopy and atomic force microscopy. The anisotropy introduced by the texture was evidenced in the surface properties, as shown by the directional dependences of wettability (water contact angle) and friction coefficient. The latter was measured using a nanotribometer and a lateral force microscope. These two techniques showed how the nanopatterns influenced the tribological properties at different scales of load and contact area. This fabrication technique finds applications in the industry of microelectromechanical systems, anisotropic tribological coatings, nanoimprint lithography, microfluidics, photonic crystals, and patterned surfaces for biomedicine. |
| اللغة: | English |
| تدمد: | 0022-3727 1361-6463 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e780cb102698b394e8588f94cc44aa71 https://hal.archives-ouvertes.fr/hal-02017565 |
| Rights: | CLOSED |
| رقم الانضمام: | edsair.doi.dedup.....e780cb102698b394e8588f94cc44aa71 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 00223727 13616463 |
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