Photonic curvilinear data processing
| العنوان: | Photonic curvilinear data processing |
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| المؤلفون: | J. Bustos, Jean-Christophe Marusic, Sébastien Pauliac, Thomas Quaglio, Thiago Figueiro, Aurélien Fay, Clyde Browning, Patrick Schiavone, Jerome Belledent |
| المساهمون: | Aselta Nanographics, Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA) |
| المصدر: | Proc. SPIE SPIE Photomask Technology SPIE Photomask Technology, Oct 2014, Monterey, United States. pp.92350V, ⟨10.1117/12.2069335⟩ |
| بيانات النشر: | HAL CCSD, 2014. |
| سنة النشر: | 2014 |
| مصطلحات موضوعية: | 010302 applied physics, Curvilinear coordinates, Data processing, Engineering, business.industry, Shot (filmmaking), ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Variable (computer science), 0103 physical sciences, Electronic engineering, Enhanced Data Rates for GSM Evolution, Photonics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business, Lithography, Electron-beam lithography, ComputingMilieux_MISCELLANEOUS, ComputingMethodologies_COMPUTERGRAPHICS |
| الوصف: | With more and more photonic data presence in e-beam lithography, the need for efficient and accurate data fracturing is required to meet acceptable manufacturing cycle time. Large photonic based layouts now create high shot count patterns for VSB based tools. Multiple angles, sweeping curves, and non-orthogonal data create a challenge for today’s e-beam tools that are more efficient on Manhattan style data. This paper describes techniques developed and used for creating fractured data for VSB based pattern generators. Proximity Effect Correction is also applied during the fracture process, taking into account variable shot sizes to apply for accuracy and design style. Choosing different fracture routines for pattern data on-the-fly allows for fast and efficient processing. Data interpretation is essential for processing curvilinear data as to its size, angle, and complexity. Fracturing complex angled data into "efficient" shot counts is no longer practical as shot creation now requires knowledge of the actual data content as seen in photonic based pattern data. Simulation and physical printing results prove the implementations for accuracy and write times compared to traditional VSB writing strategies on photonic data. Geometry tolerance is used as part of the fracturing algorithm for controlling edge placement accuracy and tuning to different e-beam processing parameters. |
| اللغة: | English |
| DOI: | 10.1117/12.2069335⟩ |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c760f529a6f19c9653287476e868e2a0 https://hal.science/hal-02362243 |
| رقم الانضمام: | edsair.doi.dedup.....c760f529a6f19c9653287476e868e2a0 |
| قاعدة البيانات: | OpenAIRE |
| DOI: | 10.1117/12.2069335⟩ |
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