Spatially‐Resolved Spectroscopic Characterization of Reflective and Transparent Materials at a Micro‐Meter Scale Using Coherence Scanning Interferometry
| العنوان: | Spatially‐Resolved Spectroscopic Characterization of Reflective and Transparent Materials at a Micro‐Meter Scale Using Coherence Scanning Interferometry |
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| المؤلفون: | Manuel Flury, Paul C. Montgomery, Rémy Claveau |
| المساهمون: | Laboratoire des sciences de l'ingénieur, de l'informatique et de l'imagerie (ICube), Institut National des Sciences Appliquées - Strasbourg (INSA Strasbourg), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-École Nationale du Génie de l'Eau et de l'Environnement de Strasbourg (ENGEES)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS), École Nationale du Génie de l'Eau et de l'Environnement de Strasbourg (ENGEES)-Université de Strasbourg (UNISTRA)-Institut National des Sciences Appliquées - Strasbourg (INSA Strasbourg), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National de Recherche en Informatique et en Automatique (Inria)-Les Hôpitaux Universitaires de Strasbourg (HUS)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS) |
| المصدر: | physica status solidi (c) physica status solidi (c), Wiley, 2017, 14 (12), ⟨10.1002/pssc.201700157⟩ physica status solidi (c), 2017, 14 (12), ⟨10.1002/pssc.201700157⟩ |
| بيانات النشر: | HAL CCSD, 2017. |
| سنة النشر: | 2017 |
| مصطلحات موضوعية: | [SPI.OTHER]Engineering Sciences [physics]/Other, White light interferometry, Signal processing, Materials science, Pixel, white light interferometry, business.industry, reflective/transparent materials, 02 engineering and technology, 010402 general chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, spectral reflectance, 01 natural sciences, Signal, 0104 chemical sciences, Characterization (materials science), Interferometry, Wavelength, Optics, Sciences de l'ingénieur [physics]/Optique / photonique, Coherence scanning interferometry, 0210 nano-technology, business, signal processing |
| الوصف: | International audience; The development of new technologies and innovative products today is often accompanied by the emergence of new micro and nanomaterials. Due to their wider use in many applications, performing accurate characterization of these materials is becoming essential. The high performance of coherence scanning interferometry for materials characterization in terms of topographic, roughness and thickness measurements as well as for tomographic analysis of transparent layers has already been well demonstrated. However, demands regarding the spectral characterization of these materials requires new operation modes using the combination of spectral measurements with high resolution imaging. In this work we present a technique for local spectral measurements by careful processing of the entire interferometric signal over the scanned depth at each pixel in the image, so providing spatially resolved measurements in both the lateral and axial directions. Being a far‐field technique, and because the sample is illuminated with a white light source, spectral information is obtained over large areas (150 × 150 μm2) at the same time and for all the wavelengths. Spectroscopic mapping of a sample consisting of four different materials (Si, Al, Ag, Ti) and depth‐resolved measurements performed through a thin layer of PDMS are reported. Spectral measurements are made over an area of about 1–2 μm2, with an axial resolution of 1 μm, these features being dependent on the optical parameters of the system. |
| اللغة: | English |
| تدمد: | 1610-1634 1610-1642 |
| DOI: | 10.1002/pssc.201700157⟩ |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ace8741baccdcc9cdfafa7daf2d602c2 https://hal.archives-ouvertes.fr/hal-02381972 |
| Rights: | OPEN |
| رقم الانضمام: | edsair.doi.dedup.....ace8741baccdcc9cdfafa7daf2d602c2 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 16101634 16101642 |
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| DOI: | 10.1002/pssc.201700157⟩ |