Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication
| العنوان: | Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication |
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| المؤلفون: | S. Martinuzzi, I. Perichaud, V. Vervisch, Marc Sentis, Ph. Delaporte, H. Etienne, Thierry Sarnet, Mathieu Halbwax, Frank Torregrosa |
| المساهمون: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Laboratoire Lasers, Plasmas et Procédés photoniques (LP3), Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS), Sarnet, Thierry |
| المصدر: | Thin Solid Films Thin Solid Films, 2008, 516, pp.6791-6795. ⟨10.1016/j.tsf.2007.12.117⟩ Thin Solid Films, Elsevier, 2008, 516 (20), pp.6791-6795 Thin Solid Films, 2008, 516 (20), pp.6791-6795 Thin Solid Films, Elsevier, 2008, 516, pp.6791-6795. ⟨10.1016/j.tsf.2007.12.117⟩ |
| بيانات النشر: | Elsevier BV, 2008. |
| سنة النشر: | 2008 |
| مصطلحات موضوعية: | Materials science, Silicon, Hybrid silicon laser, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, photovoltaic cells, Physics::Optics, chemistry.chemical_element, 02 engineering and technology, 01 natural sciences, 7. Clean energy, law.invention, chemistry.chemical_compound, Optics, femtosecond laser, law, 0103 physical sciences, texturization, Materials Chemistry, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010302 applied physics, Photocurrent, business.industry, Black silicon, Doping, Metals and Alloys, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Laser, Plasma-immersion ion implantation, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, Femtosecond, Optoelectronics, 0210 nano-technology, business |
| الوصف: | We have prepared absorbing structures for photovoltaic cells with different nanotexturization, obtained by means of a femtosecond laser, without the use of corrosive gas (under vacuum). To take in account the 3D structured front surface, the emitter doping has been realized by using Plasma Immersion Ion Implantation (so-called PULSION). The results show a photocurrent increase of about 30% in the laser textured zones. |
| تدمد: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2007.12.117 |
| DOI: | 10.1016/j.tsf.2007.12.117⟩ |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a25ffb42cbb1cda6fa2e5ea49bb6c2f0 https://doi.org/10.1016/j.tsf.2007.12.117 |
| Rights: | CLOSED |
| رقم الانضمام: | edsair.doi.dedup.....a25ffb42cbb1cda6fa2e5ea49bb6c2f0 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 00406090 |
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| DOI: | 10.1016/j.tsf.2007.12.117 |