Thin Tantalum Film Electrodeposition from an Ionic Liquid—Influence of Substrate Nature, Electrolyte Temperature and Electrochemical Parameters on Deposits’ Quality
| العنوان: | Thin Tantalum Film Electrodeposition from an Ionic Liquid—Influence of Substrate Nature, Electrolyte Temperature and Electrochemical Parameters on Deposits’ Quality |
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| المؤلفون: | Lenka Svecova, Maguy Nahra, Eric Chainet, Nicolas Sergent |
| المساهمون: | Electrochimie Interfaciale et Procédés (EIP), Laboratoire d'Electrochimie et de Physico-chimie des Matériaux et des Interfaces (LEPMI), Institut de Chimie du CNRS (INC)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Institut de Chimie du CNRS (INC)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA), Matériaux Interfaces ELectrochimie (MIEL) |
| المصدر: | Journal of The Electrochemical Society Journal of The Electrochemical Society, Electrochemical Society, 2021, 168 (8), pp.082501. ⟨10.1149/1945-7111/ac1697⟩ |
| بيانات النشر: | HAL CCSD, 2021. |
| سنة النشر: | 2021 |
| مصطلحات موضوعية: | Materials science, Tantalum, chemistry.chemical_element, 02 engineering and technology, Electrolyte, 010402 general chemistry, Electrochemistry, 01 natural sciences, law.invention, chemistry.chemical_compound, symbols.namesake, X-ray photoelectron spectroscopy, law, [CHIM.ANAL]Chemical Sciences/Analytical chemistry, Materials Chemistry, Electrolysis, Renewable Energy, Sustainability and the Environment, [CHIM.MATE]Chemical Sciences/Material chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Tantalum pentafluoride, chemistry, Chemical engineering, Ionic liquid, symbols, 0210 nano-technology, Raman spectroscopy |
| الوصف: | International audience; This paper discusses the feasibility of tantalum electrodeposition carried out under potential control from 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)imide [BMPyr][TFSI] room temperature ionic liquid electrolyte containing tantalum pentafluoride (TaF5). The influence of electrode nature, electrolyte temperature and electrolysis duration on the morphology, the adherence, the thickness and the crystalline properties of tantalum deposits is reported. The obtained tantalum deposits are analyzed by SEM, XRD, Raman spectroscopy and XPS surface analytical techniques. Pulsed potential electrodeposition is investigated in order to enhance deposit properties. Post electrodeposition thermal treatments are also reported. |
| اللغة: | English |
| تدمد: | 0013-4651 1945-7111 |
| DOI: | 10.1149/1945-7111/ac1697⟩ |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9daa2ccebe372041a06fb402d8dbe41d https://hal.archives-ouvertes.fr/hal-03327336 |
| Rights: | CLOSED |
| رقم الانضمام: | edsair.doi.dedup.....9daa2ccebe372041a06fb402d8dbe41d |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 00134651 19457111 |
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| DOI: | 10.1149/1945-7111/ac1697⟩ |