FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality
| العنوان: | FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality |
|---|---|
| المؤلفون: | David Kuhness, Jakob Wilhelm Hinum-Wagner, Gerald Kothleitner, Robert Winkler, Harald Plank |
| المصدر: | Nanomaterials, Vol 11, Iss 1527, p 1527 (2021) Nanomaterials Volume 11 Issue 6 |
| بيانات النشر: | MDPI AG, 2021. |
| سنة النشر: | 2021 |
| مصطلحات موضوعية: | Fabrication, Materials science, General Chemical Engineering, microstructure, 3D printing, 02 engineering and technology, Substrate (printing), direct write fabrication, 3D nanoprinting, 01 natural sciences, Article, shape fidelity, substrate temperature, 0103 physical sciences, Thermoelectric effect, 3D-nanostructures, General Materials Science, Electron beam-induced deposition, focused electron beam induced deposition, QD1-999, 010302 applied physics, business.industry, 021001 nanoscience & nanotechnology, Microstructure, Engineering physics, Grain size, Chemistry, metal nanostructures, Nanolithography, 0210 nano-technology, business, additive manufacturing |
| الوصف: | High-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very high design flexibility. A limitation, however, is the low fabrication speed, which often restricts 3D-FEBID for the fabrication of single objects. In this study, we approach that challenge by reducing the substrate temperatures with a homemade Peltier stage and investigate the effects on Pt based 3D deposits in a temperature range of 5–30 °C. The findings reveal a volume growth rate boost up to a factor of 5.6, while the shape fidelity in 3D space is maintained. From a materials point of view, the internal nanogranular composition is practically unaffected down to 10 °C, followed by a slight grain size increase for even lower temperatures. The study is complemented by a comprehensive discussion about the growth mechanism for a more general picture. The combined findings demonstrate that FEBID on low substrate temperatures is not only much faster, but practically free of drawbacks during high fidelity 3D nanofabrication. |
| وصف الملف: | application/pdf |
| اللغة: | English |
| تدمد: | 2079-4991 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::786889632f869235e54e933658d43de8 https://www.mdpi.com/2079-4991/11/6/1527 |
| Rights: | OPEN |
| رقم الانضمام: | edsair.doi.dedup.....786889632f869235e54e933658d43de8 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 20794991 |
|---|