We have developed procedures for the fabrication of Er–Ni and Pr–Pt liquid alloy ion sources (LAIS). Er2+beam with target current of ∼100 pA and Pr2+ beams with target current of ∼200 pA were obtained, which correspond to 50% and 80% of the total target current, respectively. Both Er–Ni and Pr–Pt alloys oxidize quickly once exposed to air. Er–Ni source lifetimes were generally larger than 200 μA h. The source lifetimes of Pr–Pt LAISs were approximately 30 μA h, limited by oxide contamination and wettability problems. Visible photoluminescence has been observed from Er- or Pr-doped GaN, Al2O3, and ZBLAN glass using focused ion beam direct write implantation.