3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

التفاصيل البيبلوغرافية
العنوان: 3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator
المؤلفون: Peng Zhou, Yuanjie Wan, Zhiwei Li, Baofa Hu, Chunquan Zhang, Haisheng San
المصدر: Measurement Science Review, Vol 21, Iss 3, Pp 76-81 (2021)
بيانات النشر: Sciendo, 2021.
سنة النشر: 2021
مصطلحات موضوعية: 010302 applied physics, 3d printed, gas pressure sensor, Surface acoustic wave resonators, Materials science, linbo3, business.industry, 3d printing, Acoustics, Surface acoustic wave, Biomedical Engineering, 3D printing, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Pressure sensor, surface acoustic wave, Control and Systems Engineering, 0103 physical sciences, QA1-939, 0210 nano-technology, business, Instrumentation, Mathematics
الوصف: This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.
اللغة: English
تدمد: 1335-8871
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5e11368515f890ce46f782512e6194bf
https://doaj.org/article/b780615606f64718a809ee7b43a8f2ec
Rights: OPEN
رقم الانضمام: edsair.doi.dedup.....5e11368515f890ce46f782512e6194bf
قاعدة البيانات: OpenAIRE