Developments on a SEM-based X-ray tomography system: Stabilization scheme and performance evaluation
| العنوان: | Developments on a SEM-based X-ray tomography system: Stabilization scheme and performance evaluation |
|---|---|
| المؤلفون: | Pierre Bleuet, W. Parker, J. Filevich, L. F. Tz. Kwakman, B. Buijsse, L. A. Gomes Perini |
| المصدر: | Review of Scientific Instruments. 88:063706 |
| بيانات النشر: | AIP Publishing, 2017. |
| سنة النشر: | 2017 |
| مصطلحات موضوعية: | 010302 applied physics, Physics, CMOS sensor, Digital image correlation, business.industry, Noise (signal processing), Fast Fourier transform, Resolution (electron density), 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Optics, 0103 physical sciences, Microelectronics, Tomography, 0210 nano-technology, business, Instrumentation, Image resolution |
| الوصف: | Recent improvements in a SEM-based X-ray tomography system are described. In this type of equipment, X-rays are generated through the interaction between a highly focused electron-beam and a geometrically confined anode target. Unwanted long-term drifts of the e-beam can lead to loss of X-ray flux or decrease of spatial resolution in images. To circumvent this issue, a closed-loop control using FFT-based image correlation is integrated to the acquisition routine, in order to provide an in-line drift correction. The X-ray detection system consists of a state-of-the-art scientific CMOS camera (indirect detection), featuring high quantum efficiency (∼60%) and low read-out noise (∼1.2 electrons). The system performance is evaluated in terms of resolution, detectability, and scanning times for applications covering three different scientific fields: microelectronics, technical textile, and material science. |
| تدمد: | 1089-7623 0034-6748 |
| DOI: | 10.1063/1.4989406 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::499d1f2166362849f3a500225f7457f6 https://doi.org/10.1063/1.4989406 |
| رقم الانضمام: | edsair.doi.dedup.....499d1f2166362849f3a500225f7457f6 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 10897623 00346748 |
|---|---|
| DOI: | 10.1063/1.4989406 |