Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint
| العنوان: | Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint |
|---|---|
| المؤلفون: | Luca Selmi, Carlotta Guiducci, Thomas Ernst, Pierpaolo Palestri, Enrico Accastelli, Paolo Scarbolo |
| المصدر: | Biosensors; Volume 6; Issue 1; Pages: 9 Biosensors Biosensors, Vol 6, Iss 1, p 9 (2016) |
| سنة النشر: | 2016 |
| مصطلحات موضوعية: | tri-gate transistors, Silicon, Materials science, Transistors, Electronic, lcsh:Biotechnology, Clinical Biochemistry, Nanowire, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, Biosensing Techniques, Hardware_PERFORMANCEANDRELIABILITY, Signal-To-Noise Ratio, 01 natural sciences, Article, law.invention, silicon nanowires, ISFET, pH sensors, 1/f noise, Footprint (electronics), law, lcsh:TP248.13-248.65, 0103 physical sciences, Hardware_INTEGRATEDCIRCUITS, Electronic circuit, 010302 applied physics, Nanowires, Transistor, General Medicine, Hydrogen-Ion Concentration, 021001 nanoscience & nanotechnology, CMOS, chemistry, Nanometre, 0210 nano-technology, Hardware_LOGICDESIGN |
| الوصف: | The signal-to-noise ratio of planar ISFET pH sensors deteriorates when reducing the area occupied by the device, thus hampering the scalability of on-chip analytical systems which detect the DNA polymerase through pH measurements. Top-down nano-sized tri-gate transistors, such as silicon nanowires, are designed for high performance solid-state circuits thanks to their superior properties of voltage-to-current transduction, which can be advantageously exploited for pH sensing. A systematic study is carried out on rectangular-shaped nanowires developed in a complementary metal-oxide-semiconductor (CMOS)-compatible technology, showing that reducing the width of the devices below a few hundreds of nanometers leads to higher charge sensitivity. Moreover, devices composed of several wires in parallel further increase the exposed surface per unit footprint area, thus maximizing the signal-to-noise ratio. This technology allows a sub milli-pH unit resolution with a sensor footprint of about 1 mu m(2), exceeding the performance of previously reported studies on silicon nanowires by two orders of magnitude. |
| وصف الملف: | application/pdf |
| اللغة: | English |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2e9cadc28780e33d6f776cf5d8d4263c https://hdl.handle.net/11380/1163090 |
| Rights: | OPEN |
| رقم الانضمام: | edsair.doi.dedup.....2e9cadc28780e33d6f776cf5d8d4263c |
| قاعدة البيانات: | OpenAIRE |
| الوصف غير متاح. |