A Complete Si Photonics Platform Embedding Ultra-Low Loss Waveguides for O- and C-Band
| العنوان: | A Complete Si Photonics Platform Embedding Ultra-Low Loss Waveguides for O- and C-Band |
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| المؤلفون: | Quentin Wilmart, Andre Myko, Bertrand Szelag, Benoit Charbonnier, Daivid Fowler, Jean-Michel Hartmann, Camille Petit-Etienne, Erwine Pargon, Laurene Youssef, Corrado Sciancalepore, S. Brision, Karen Ribaud, Stephane Bernabe |
| المساهمون: | Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA) |
| المصدر: | Journal of Lightwave Technology Journal of Lightwave Technology, Institute of Electrical and Electronics Engineers (IEEE)/Optical Society of America(OSA), 2021, 39 (2), pp.532-538. ⟨10.1109/JLT.2020.3030123⟩ Journal of Lightwave Technology, 2021, 39 (2), pp.532-538. ⟨10.1109/JLT.2020.3030123⟩ |
| بيانات النشر: | HAL CCSD, 2021. |
| سنة النشر: | 2021 |
| مصطلحات موضوعية: | Materials science, Silicon, business.industry, Annealing (metallurgy), C band, Loss measurement, Beam steering, Silicon photonics, chemistry.chemical_element, 02 engineering and technology, Atomic and Molecular Physics, and Optics, Annealing, Photonic integrated circuits, 020210 optoelectronics & photonics, chemistry, 0202 electrical engineering, electronic engineering, information engineering, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Embedding, Waveguide, Photonics, business, Smoothing, Cmos compatible |
| الوصف: | International audience; We report ultra-low propagation losses in silicon submicrometric waveguides on a 200 mm CMOS compatible photonics platform. We show losses in C-band (O-band) as low as 0.1 dB/cm and 0.7dB/cm (0.14dB/cm and 1.1dB/cm) in monomode rib and strip waveguide geometries, respectively, thanks to a H2 smoothing annealing. In addition to optical losses down to unprecedented levels in silicon waveguides, we show that the performance characteristics of the main passive and active building blocks of the photonics platform are preserved or even improved by the smoothing process. |
| اللغة: | English |
| تدمد: | 0733-8724 1558-2213 |
| DOI: | 10.1109/JLT.2020.3030123⟩ |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2bfa7b7c6f3a4d43678e0d7a0eb8df11 https://hal.archives-ouvertes.fr/hal-03173743/document |
| Rights: | OPEN |
| رقم الانضمام: | edsair.doi.dedup.....2bfa7b7c6f3a4d43678e0d7a0eb8df11 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 07338724 15582213 |
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| DOI: | 10.1109/JLT.2020.3030123⟩ |