A study of structure and surface morphology together with magnetic properties of Mn-implanted rutile-type TiO2 single crystals is performed. Homogenous thin films of about 100 nm with different MnxTi1�xO2 (x=0.03; 0.05 and 0.07) chemical formula were obtained. The Mn ion implanted surface exhibited a dense microstructure with a nano grain size. The dependence of c/a axial ratio on manganese content suggests that Mn 3+ species substituted tetragonal Ti 4+ . The annealing at 873 K caused changes in surface structure, morphology and roughness. A migration of manganese ions into the rutile single crystal takes place and in certain conditions Ti2O phase occurs. Mn-implanted samples exhibit room temperature ferromagnetism and a Curie temperature of 680 K. Electron spin resonance analysis evidenced that manganese is incorporated by substitution as magnetically isolated Mn 4+ ,M n 3+ and Mn 2+ species. At 0.07% contents the Mn 3+ species may enter in interstitial sites contributing