Electron beam diagnostic for electric field measurement in RF discharges
| العنوان: | Electron beam diagnostic for electric field measurement in RF discharges |
|---|---|
| المؤلفون: | M.A. Lieberman, A.H. Sato |
| المصدر: | 1990 Plasma Science IEEE Conference Record - Abstracts. |
| بيانات النشر: | IEEE, 1990. |
| سنة النشر: | 1990 |
| مصطلحات موضوعية: | Materials science, Argon, business.industry, chemistry.chemical_element, Plasma, Nuclear magnetic resonance, Amplitude, Optics, chemistry, Electric field, Temporal resolution, Cathode ray, Plasma diagnostics, business, Voltage |
| الوصف: | Summary form only given. An electron-beam diagnostic has been used to measure electric fields in a capacitively coupled RF discharge in argon. The technique employed achieves a temporal resolution of 5 ns and a spatial resolution of 3 mm. This has proved adequate to measure fields in discharges from 2 mtorr to a few tens of millitorr, RF voltage amplitudes of 100 V to 600 V, and RF driving frequencies up to 13.56 MHz. In 2.3-mtorr discharges at 13.6 MHz, the following have been observed: (1) fields in the plasma of up to 5 V/cm peak-to-peak, (2) asymmetric collapse and expansion of a constant electric field boundary in the sheath, (3) electric field near the powered electrode pointing near the zero in the sheath voltage, and (4) appearance of a double layer in the sheath during its collapse |
| DOI: | 10.1109/plasma.1990.110774 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::daa23f23deae63b005d0f2a60632d9dd https://doi.org/10.1109/plasma.1990.110774 |
| رقم الانضمام: | edsair.doi...........daa23f23deae63b005d0f2a60632d9dd |
| قاعدة البيانات: | OpenAIRE |
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