Electron beam diagnostic for electric field measurement in RF discharges

التفاصيل البيبلوغرافية
العنوان: Electron beam diagnostic for electric field measurement in RF discharges
المؤلفون: M.A. Lieberman, A.H. Sato
المصدر: 1990 Plasma Science IEEE Conference Record - Abstracts.
بيانات النشر: IEEE, 1990.
سنة النشر: 1990
مصطلحات موضوعية: Materials science, Argon, business.industry, chemistry.chemical_element, Plasma, Nuclear magnetic resonance, Amplitude, Optics, chemistry, Electric field, Temporal resolution, Cathode ray, Plasma diagnostics, business, Voltage
الوصف: Summary form only given. An electron-beam diagnostic has been used to measure electric fields in a capacitively coupled RF discharge in argon. The technique employed achieves a temporal resolution of 5 ns and a spatial resolution of 3 mm. This has proved adequate to measure fields in discharges from 2 mtorr to a few tens of millitorr, RF voltage amplitudes of 100 V to 600 V, and RF driving frequencies up to 13.56 MHz. In 2.3-mtorr discharges at 13.6 MHz, the following have been observed: (1) fields in the plasma of up to 5 V/cm peak-to-peak, (2) asymmetric collapse and expansion of a constant electric field boundary in the sheath, (3) electric field near the powered electrode pointing near the zero in the sheath voltage, and (4) appearance of a double layer in the sheath during its collapse
DOI: 10.1109/plasma.1990.110774
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::daa23f23deae63b005d0f2a60632d9dd
https://doi.org/10.1109/plasma.1990.110774
رقم الانضمام: edsair.doi...........daa23f23deae63b005d0f2a60632d9dd
قاعدة البيانات: OpenAIRE
الوصف
DOI:10.1109/plasma.1990.110774