Growth and Thermal Stability of SiGe/Si Superlattices on Bulk Si Wafers
| العنوان: | Growth and Thermal Stability of SiGe/Si Superlattices on Bulk Si Wafers |
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| المؤلفون: | T. Billon, Thomas Ernst, Anne-Marie Papon, J. P. Colonna, Jean-Michel Hartmann |
| المصدر: | ECS Transactions. 16:341-351 |
| بيانات النشر: | The Electrochemical Society, 2008. |
| سنة النشر: | 2008 |
| مصطلحات موضوعية: | Materials science, business.industry, Superlattice, Optoelectronics, Thermal stability, Wafer, business |
| الوصف: | Deals with (i) the growth and thermal stability of large number or periods SiGe/Si superlattices on bulk Si and (ii) the impact of B and P doping and of C alloying of SiGe on the growth kinetics of SiGe/Si superlattices. |
| تدمد: | 1938-6737 1938-5862 |
| DOI: | 10.1149/1.2986792 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::cdaa61f184a25928d7e1d801cf57f024 https://doi.org/10.1149/1.2986792 |
| Rights: | CLOSED |
| رقم الانضمام: | edsair.doi...........cdaa61f184a25928d7e1d801cf57f024 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 19386737 19385862 |
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| DOI: | 10.1149/1.2986792 |