Structural and electron transport properties of single-crystalline In2O3 films compensated by Ni acceptors

التفاصيل البيبلوغرافية
العنوان: Structural and electron transport properties of single-crystalline In2O3 films compensated by Ni acceptors
المؤلفون: Alexandra Papadogianni, Lutz Kirste, Oliver Bierwagen
المصدر: Applied Physics Letters. 111:262103
بيانات النشر: AIP Publishing, 2017.
سنة النشر: 2017
مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Annealing (metallurgy), Doping, Oxide, Analytical chemistry, Conductance, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, chemistry.chemical_compound, chemistry, Hall effect, 0103 physical sciences, Thermoelectric effect, 010306 general physics, 0210 nano-technology, Indium, Molecular beam epitaxy
الوصف: For device applications, the ability to grow semi-insulating or p-type indium oxide (In2O3) is highly desirable. With this in focus, high quality single-crystalline Ni-doped In2O3 films have been grown by plasma-assisted molecular beam epitaxy and structurally and electrically characterized. Within a concentration range of approximately 1017–1019 cm−3, Ni is fully incorporated in the In2O3 lattice without the formation of secondary phases. At doping higher than roughly 1020 cm−3, secondary phases seem to start forming. No film exhibits p-type conductivity at room temperature. Instead, Ni is shown to be a deep compensating acceptor—confirming theoretical calculations, the effect of which only becomes apparent after annealing in oxygen. Combined Hall and Seebeck measurements reveal the compensation of bulk donors already at low Ni concentrations (∼1018 cm−3) and a residual film conductance due to mainly the interface region to the substrate. This residual conductance is gradually pinched off with increasing...
تدمد: 1077-3118
0003-6951
DOI: 10.1063/1.5006421
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c9dc2a4304bfa246445ce43b429dd3c7
https://doi.org/10.1063/1.5006421
رقم الانضمام: edsair.doi...........c9dc2a4304bfa246445ce43b429dd3c7
قاعدة البيانات: OpenAIRE
الوصف
تدمد:10773118
00036951
DOI:10.1063/1.5006421