Hexafluoroalcohol (HFA) containing molecular resist materials for high-resolution lithographic applications

التفاصيل البيبلوغرافية
العنوان: Hexafluoroalcohol (HFA) containing molecular resist materials for high-resolution lithographic applications
المؤلفون: Greg Breyta, William D. Hinsberg, Ratnam Sooriyakumaran, Linda K. Sundberg, Anuja De Silva, Luisa D. Bozano, Masaki Fujiwara
المصدر: SPIE Proceedings.
بيانات النشر: SPIE, 2011.
سنة النشر: 2011
مصطلحات موضوعية: Materials science, Resist, Extreme ultraviolet lithography, High resolution, Nanotechnology, Resorcinarene, Casting, Lithography
الوصف: Molecular glass resists have gained attention for the past decade as a potential platform for high resolution lithography. Several molecular resist materials based on the calix[4]resorcinarene system have been developed. Though this molecular system is very versatile, there are several challenges with the synthesis and processing of these materials. The difficulty to synthesize a monodipserse unit, the poor solubility in casting solvents and incompatibility with conventional developer are some noted challenges. We have addressed these issues by designing a new calix[4]resorcinarene resist material with hexafluro alcohol (HFA) units. The resist platform has been evaluated with e-beam and EUV lithography.
تدمد: 0277-786X
DOI: 10.1117/12.881735
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c35ff6e779398503cd7a8333417f4e0c
https://doi.org/10.1117/12.881735
رقم الانضمام: edsair.doi...........c35ff6e779398503cd7a8333417f4e0c
قاعدة البيانات: OpenAIRE
الوصف
تدمد:0277786X
DOI:10.1117/12.881735